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Nicholas Alan Ryza
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Austin, TX, US
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Patents Grants
last 30 patents
Information
Patent Grant
Developing photoresist with supercritical fluid and developer
Patent number
7,044,662
Issue date
May 16, 2006
Tokyo Electron Limited
Chantal J. Arena-Foster
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Process and apparatus for removing a contaminant from a substrate
Patent number
6,953,654
Issue date
Oct 11, 2005
Tokyo Electron Limited
Nicholas A. Ryza
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Drying resist with a solvent bath and supercritical CO2
Patent number
6,928,746
Issue date
Aug 16, 2005
Tokyo Electron Limited
Chantal J. Arena-Foster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Developing photoresist with supercritical fluid and developer
Patent number
6,924,086
Issue date
Aug 2, 2005
Tokyo Electron Limited
Chantal J. Arena-Foster
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND PROCESSING SYSTEM FOR RAPID HOTPLATE COOL DOWN
Publication number
20080099463
Publication date
May 1, 2008
TOKYO ELECTRON LIMITED
Nicholas Alan Ryza
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Developing photoresist with supercritical fluid and developer
Publication number
20050008980
Publication date
Jan 13, 2005
Chantal J. Arena-Foster
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Removal of contaminants using supercritical processing
Publication number
20040072706
Publication date
Apr 15, 2004
Chantal J. Arena-Foster
B08 - CLEANING
Information
Patent Application
Drying resist with a solvent bath and supercritical CO2
Publication number
20040035021
Publication date
Feb 26, 2004
Chantal J. Arena-Foster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Process and apparatus for removing a contaminant from a substrate
Publication number
20030175626
Publication date
Sep 18, 2003
Nicholas A. Ryza
B08 - CLEANING