Nicholas E. Miller

Person

Cupertino, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Primary flow CVD apparatus comprising gas preheater and means for s...
- Patent number 5,320,680
- Issue date Jun 14, 1994
- Silicon Valley Group, Inc.
- Arthur J. Learn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Refractory metal deposition process
- Patent number 4,794,019
- Issue date Dec 27, 1988
- Applied Materials, Inc.
- Nicholas E. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition process
- Patent number 4,547,404
- Issue date Oct 15, 1985
- Anicon, Inc.
- Bryant A. Campbell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition apparatus
- Patent number 4,545,327
- Issue date Oct 8, 1985
- Anicon, Inc.
- Bryant A. Campbell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition apparatus
- Patent number 4,539,933
- Issue date Sep 10, 1985
- Anicon, Inc.
- Bryant A. Campbell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate loading means for a chemical vapor deposition apparatus
- Patent number 4,524,719
- Issue date Jun 25, 1985
- Anicon, Inc.
- Bryant A. Campbell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Nicholas E. Miller

Person

Patents Grantslast 30 patents

Primary flow CVD apparatus comprising gas preheater and means for s...

Refractory metal deposition process

Chemical vapor deposition process

Chemical vapor deposition apparatus

Chemical vapor deposition apparatus

Substrate loading means for a chemical vapor deposition apparatus