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Nicholas James Keller
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New York, NY, US
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last 30 patents
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Patent Grant
3D target for monitoring multiple patterning process
Patent number
10,061,210
Issue date
Aug 28, 2018
Nanometrics Incorporated
Jiangtao Hu
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
3D TARGET FOR MONITORING MULTIPLE PATTERNING PROCESS
Publication number
20170031248
Publication date
Feb 2, 2017
Nanometrics Incorporated
Jiangtao HU
G01 - MEASURING TESTING