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Nicholas Louka
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Richmond, VA, US
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last 30 patents
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Patent Grant
Lithography method and system with correction of overlay offset err...
Patent number
7,184,853
Issue date
Feb 27, 2007
Infineon Technologies Richmond, LP
William Roberts
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Lithography method and system with correction of overlay offset err...
Publication number
20060265097
Publication date
Nov 23, 2006
William Roberts
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY