Nicholas Pornsin-Sirirak

Follow

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Silicon-containing structure with deep etched features, and method...
- Patent number 7,618,548
- Issue date Nov 17, 2009
- Applied Materials, Inc.
- Jeffrey D. Chinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of plasma etching a deeply recessed feature in a substrate u...
- Patent number 7,074,723
- Issue date Jul 11, 2006
- Applied Materials, Inc.
- Jeffrey D. Chinn
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Silicon-containing structure with deep etched features, and method...
- Publication number 20060205238
- Publication date Sep 14, 2006
- Jeffrey D. Chinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PLASMA ETCHING A DEEPLY RECESSED FEATURE IN A SUBSTRATE U...
- Publication number 20040023508
- Publication date Feb 5, 2004
- APPLIED MATERIALS, INC.
- Jeffrey D. Chinn
- H01 - BASIC ELECTRIC ELEMENTS