Nicholas R. Denny

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for in-situ cleaning of a process chamber
- Patent number 9,627,185
- Issue date Apr 18, 2017
- Applied Materials, Inc.
- Joel M. Huston
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition chambers with UV treatment and methods of use
- Patent number 9,252,024
- Issue date Feb 2, 2016
- Applied Materials, Inc.
- Hyman Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber lid design with built-in plasma source for short li...
- Patent number 9,004,006
- Issue date Apr 14, 2015
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR IN-SITU CLEANING OF A PROCESS CHAMBER
- Publication number 20150155142
- Publication date Jun 4, 2015
- Applied Materials, Inc.
- JOEL M. HUSTON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION CHAMBERS WITH UV TREATMENT AND METHODS OF USE
- Publication number 20140342555
- Publication date Nov 20, 2014
- Hyman Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROVIDING PLASMA TO A PROCESS CHAMBER
- Publication number 20140165911
- Publication date Jun 19, 2014
- Applied Materials, Inc.
- CHIEN-TEH KAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS CHAMBER LID DESIGN WITH BUILT-IN PLASMA SOURCE FOR SHORT LI...
- Publication number 20110265721
- Publication date Nov 3, 2011
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...