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Nicholas Stephen APONE
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Fairfield, CT, US
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus and illumination uniformity correction system
Patent number
11,656,555
Issue date
May 23, 2023
ASML Holding N.V.
Janardan Nath
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
LITHOGRAPHIC APPARATUS AND ILLUMINATION UNIFORMITY CORRECTION SYSTEM
Publication number
20220214622
Publication date
Jul 7, 2022
ASML Holding N.V.
Janardan NATH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY