Nico Antonius Hubertus Johannes Boonen

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Geldrop, NL

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Patents Grantslast 30 patents

Information Patent Grant
Cooling arrangement and lithographic apparatus comprising a resilie...
- Patent number 8,817,228
- Issue date Aug 26, 2014
- ASML Netherland B.V.
- Bastiaan Andreas Wilhelmus Hubertus Knarren
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC