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Nicolaas A.A.J. van Asten
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Breda, NL
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Patents Grants
last 30 patents
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Patent Grant
Off-axis leveling in lithographic projection apparatus
Patent number
7,019,815
Issue date
Mar 28, 2006
ASML Netherlands B.V.
Johannes C. M. Jasper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Off-axis levelling in lithographic projection apparatus
Patent number
6,674,510
Issue date
Jan 6, 2004
ASML Netherlands B.V.
Johannes C. M. Jasper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Off-axis levelling in lithographic projection apparatus
Publication number
20050088638
Publication date
Apr 28, 2005
ASML NETHERLANDS B.V.
Johannes C.M. Jasper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY