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Nicolas Lorphelin
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Lille, FR
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last 30 patents
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Patent Grant
MEMS structure with a flexible membrane and improved electric actua...
Patent number
8,593,239
Issue date
Nov 26, 2013
DELFMEMS
Karim Segueni
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
MEMS STRUCTURE WITH A FLEXIBLE MEMBRANE AND IMPROVED ELECTRIC ACTUA...
Publication number
20110315529
Publication date
Dec 29, 2011
DELFMEMS
Karim Segueni
B81 - MICRO-STRUCTURAL TECHNOLOGY