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Niek Antonius Jacobus Maria KLEEMANS
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Eindhoven, NL
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last 30 patents
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Patent Grant
Radiation source having debris control
Patent number
10,588,211
Issue date
Mar 10, 2020
ASML Netherlands B.V.
Rolf Theodorus Nicolaas Beijsens
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Patent Grant
Source collector apparatus, lithographic apparatus and method
Patent number
9,964,852
Issue date
May 8, 2018
ASML Netherlands B.V.
Niek Antonius Jacobus Maria Kleemans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Source collector apparatus, lithographic apparatus and method
Patent number
9,841,680
Issue date
Dec 12, 2017
ASML Netherlands B.V.
Niek Antonius Jacobus Maria Kleemans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source
Patent number
9,835,950
Issue date
Dec 5, 2017
ASML Netherland B.V.
Markus Franciscus Antonius Eurlings
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
SOURCE COLLECTOR APPARATUS, LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20180120711
Publication date
May 3, 2018
ASML NETHERLANDS B.V.
Niek Antonius Jacobus Maria KLEEMANS
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Radiation Source
Publication number
20160334711
Publication date
Nov 17, 2016
ASML NETHERLANDS B.V.
Markus Franciscus Antonius EURLINGS
G02 - OPTICS
Information
Patent Application
RADIATION SOURCE
Publication number
20160278196
Publication date
Sep 22, 2016
ASML NETHERLANDS B.V.
Rolf Theodorus Nicolaas BEIJSENS
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SOURCE COLLECTOR APPARATUS, LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20160054663
Publication date
Feb 25, 2016
ASML NETHERLANDS B.V.
Niek Antonius Jacobus Maria KLEEMANS
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR