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Niels GEYPEN
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Lommel, BE
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Patents Grants
last 30 patents
Information
Patent Grant
HHG source, inspection apparatus and method for performing a measur...
Patent number
10,816,906
Issue date
Oct 27, 2020
ASML Netherlands B.V.
Nan Lin
G02 - OPTICS
Information
Patent Grant
Metrology apparatus for and a method of determining a characteristi...
Patent number
10,670,974
Issue date
Jun 2, 2020
ASML Netherlands B.V.
Gerrit Jacobus Hendrik Brussaard
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of aligning a pair of complementary diffraction patterns and...
Patent number
10,401,739
Issue date
Sep 3, 2019
ASML Netherlands B.V.
Niels Geypen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
HHG source, inspection apparatus and method for performing a measur...
Patent number
10,234,771
Issue date
Mar 19, 2019
ASML Netherlands B.V.
Nan Lin
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR DETERMINING A STOCHASTIC METRIC RELATING TO A LITHOGRAPH...
Publication number
20240369944
Publication date
Nov 7, 2024
ASML NETHERLANDS B.V.
Chrysostomos BATISTAKIS
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR CORRECTING MEASUREMENTS IN THE MANUFACTURE OF INTEGRATED...
Publication number
20230040124
Publication date
Feb 9, 2023
ASML NETHERLANDS B.V.
Han-Kwang NIENHUYS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology Apparatus for and a Method of Determining a Characteristi...
Publication number
20190204757
Publication date
Jul 4, 2019
ASML NETHERLANDS B.V.
Gerrit Jacobus Hendrik BRUSSAARD
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HHG Source, Inspection Apparatus and Method for Performing a Measur...
Publication number
20190155171
Publication date
May 23, 2019
ASML NETHERLANDS B.V.
Nan LIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF ALIGNING A PAIR OF COMPLEMENTARY DIFFRACTION PATTERNS AND...
Publication number
20190079410
Publication date
Mar 14, 2019
ASML NETHERLANDS B.V.
Niels Geypen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HHG Source, Inspection Apparatus and Method for Performing a Measur...
Publication number
20170315456
Publication date
Nov 2, 2017
ASML NETHERLANDS B.V.
Nan LIN
G02 - OPTICS