Niels Vergeer

Person

Rotterdam, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithography system and method for processing a target, such as a wafer
- Patent number RE49241
- Issue date Oct 11, 2022
- ASML Netherlands B.V.
- Niels Vergeer
Information Patent Grant
Method of determining a position of a substrate in a lithography sy...
- Patent number 10,054,863
- Issue date Aug 21, 2018
- Mapper Lithography IP B.V.
- Guido De Boer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithography system and method for processing a target, such as a wafer
- Patent number 9,760,028
- Issue date Sep 12, 2017
- Mapper Lithography IP B.V.
- Niels Vergeer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Interferometer module
- Patent number 9,690,215
- Issue date Jun 27, 2017
- Mapper Lithography IP B.V.
- Guido de Boer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography system with differential interferometer module
- Patent number 9,678,443
- Issue date Jun 13, 2017
- Mapper Lithography IP B.V.
- Guido de Boer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged particle lithography system with alignment sensor and beam...
- Patent number 9,665,014
- Issue date May 30, 2017
- Mapper Lithography IP B.V.
- Paul Ijmert Scheffers
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Multi-axis differential interferometer
- Patent number 9,551,563
- Issue date Jan 24, 2017
- Mapper Lithography IP B.V.
- Godefridus Cornelius Antonius Couweleers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Individual beam pattern placement verification in multiple beam lit...
- Patent number 9,484,188
- Issue date Nov 1, 2016
- Mapper Lithography IP B.V.
- Niels Vergeer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography system for processing a target, such as a wafer, and a...
- Patent number 9,395,636
- Issue date Jul 19, 2016
- Mapper Lithography IP B.V.
- Guido De Boer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position determination in a lithography system using a substrate ha...
- Patent number 9,395,635
- Issue date Jul 19, 2016
- Mapper Lithography IP B.V.
- Guido De Boer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography system for processing at least a part of a target
- Patent number 9,383,662
- Issue date Jul 5, 2016
- Mapper Lithography IP B.V.
- Niels Vergeer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment of an interferometer module for use in an exposure tool
- Patent number 9,261,800
- Issue date Feb 16, 2016
- Mapper Lithography IP B.V.
- Guido de Boer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography system for processing a target, such as a wafer, a meth...
- Patent number 9,201,315
- Issue date Dec 1, 2015
- Mapper Lithography IP B.V.
- Guido De Boer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Interferometer module
- Patent number 9,069,265
- Issue date Jun 30, 2015
- Mapper Lithography IP B.V.
- Guido de Boer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Capacitive sensing system
- Patent number 8,841,920
- Issue date Sep 23, 2014
- Mapper Lithography IP B.V.
- Guido De Boer
- G01 - MEASURING TESTING
Information Patent Grant
Capacitive sensing system with differential pairs
- Patent number 8,638,109
- Issue date Jan 28, 2014
- Mapper Lithography IP B.V.
- Guido De Boer
- G01 - MEASURING TESTING
Information Patent Grant
Capacitive sensing system
- Patent number 8,570,055
- Issue date Oct 29, 2013
- Mapper Lithography IP B.V.
- Guido De Boer
- G01 - MEASURING TESTING
Information Patent Grant
Integrated sensor system
- Patent number 8,513,959
- Issue date Aug 20, 2013
- Mapper Lithography IP B.V.
- Guido De Boer
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
ALIGNMENT DETERMINATION METHOD AND COMPUTER PROGRAM
- Publication number 20230207259
- Publication date Jun 29, 2023
- ASML NETHERLANDS B.V.
- Erwin SLOT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY SYSTEM WITH DIFFERENTIAL INTERFEROMETER MODULE
- Publication number 20170277043
- Publication date Sep 28, 2017
- MAPPER LITHOGRAPHY IP BV
- Guido de Boer
- G01 - MEASURING TESTING
Information Patent Application
Individual beam pattern placement verification in multiple beam lit...
- Publication number 20160268099
- Publication date Sep 15, 2016
- MAPPER LITHOGRAPHY IP BV
- Niels VERGEER
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETER MODULE
- Publication number 20150268032
- Publication date Sep 24, 2015
- MAPPER LITHOGRAPHY IP BV
- Guido de Boer
- G01 - MEASURING TESTING
Information Patent Application
MULTI-AXIS DIFFERENTIAL INTERFEROMETER
- Publication number 20150241200
- Publication date Aug 27, 2015
- MAPPER LITHOGRAPHY IP BV
- Godefridus Cornelius Antonius Couweleers
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHY SYSTEM AND METHOD FOR PROCESSING A TARGET, SUCH AS A WAFER
- Publication number 20150109598
- Publication date Apr 23, 2015
- MAPPER LITHOGRAPHY IP BV
- Niels Vergeer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH ALIGNMENT SENSOR AND BEAM...
- Publication number 20150109601
- Publication date Apr 23, 2015
- MAPPER LITHOGRAPHY IP BV
- Paul IJmert Scheffers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CAPACITIVE SENSING SYSTEM
- Publication number 20140049276
- Publication date Feb 20, 2014
- MAPPER LITHOGRAPHY IP BV
- Guido DE BOER
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHY SYSTEM FOR PROCESSING AT LEAST A PART OF A TARGET
- Publication number 20120287411
- Publication date Nov 15, 2012
- Niels Vergeer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY SYSTEM FOR PROCESSING A TARGET, SUCH AS A WAFER, A METH...
- Publication number 20120268724
- Publication date Oct 25, 2012
- Guido De Boer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY SYSTEM FOR PROCESSING A TARGET, SUCH AS A WAFER, AND A...
- Publication number 20120268725
- Publication date Oct 25, 2012
- Guido De Boer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION DETERMINATION IN A LITHOGRAPHY SYSTEM USING A SUBSTRATE HA...
- Publication number 20120267802
- Publication date Oct 25, 2012
- Guido De Boer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTERFEROMETER MODULE
- Publication number 20120250026
- Publication date Oct 4, 2012
- Guido do Boer
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHY SYSTEM WITH DIFFERENTIAL INTERFEROMETER MODULE
- Publication number 20120249984
- Publication date Oct 4, 2012
- Guido de Boer
- G01 - MEASURING TESTING
Information Patent Application
ALIGNMENT OF AN INTERFEROMETER MODULE FOR USE IN AN EXPOSURE TOOL
- Publication number 20120250030
- Publication date Oct 4, 2012
- Guido de Boer
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE METHOD
- Publication number 20110261344
- Publication date Oct 27, 2011
- MAPPER LITHOGRAPHY IP BV
- Guido DE BOER
- G01 - MEASURING TESTING
Information Patent Application
CAPACITIVE SENSING SYSTEM WITH DIFFERENTIAL PAIRS
- Publication number 20110254565
- Publication date Oct 20, 2011
- MAPPER LITHOGRAPHY IP BV
- Guido De Boer
- G01 - MEASURING TESTING
Information Patent Application
CAPACITIVE SENSING SYSTEM
- Publication number 20110193574
- Publication date Aug 11, 2011
- MAPPER LITHOGRAPHY IP BV
- Guido DE BOER
- G01 - MEASURING TESTING
Information Patent Application
INTEGRATED SENSOR SYSTEM
- Publication number 20110193573
- Publication date Aug 11, 2011
- MAPPER LITHOGRAPHY IP BV
- Guido DE BOER
- G01 - MEASURING TESTING

Niels Vergeer

Person

Patents Grantslast 30 patents

Lithography system and method for processing a target, such as a wafer

Method of determining a position of a substrate in a lithography sy...

Lithography system and method for processing a target, such as a wafer

Interferometer module

Lithography system with differential interferometer module

Charged particle lithography system with alignment sensor and beam...

Multi-axis differential interferometer

Individual beam pattern placement verification in multiple beam lit...

Lithography system for processing a target, such as a wafer, and a...

Position determination in a lithography system using a substrate ha...

Lithography system for processing at least a part of a target

Alignment of an interferometer module for use in an exposure tool

Lithography system for processing a target, such as a wafer, a meth...

Interferometer module

Capacitive sensing system

Capacitive sensing system with differential pairs

Capacitive sensing system

Integrated sensor system

Patents Applicationslast 30 patents

ALIGNMENT DETERMINATION METHOD AND COMPUTER PROGRAM

LITHOGRAPHY SYSTEM WITH DIFFERENTIAL INTERFEROMETER MODULE

Individual beam pattern placement verification in multiple beam lit...

INTERFEROMETER MODULE

MULTI-AXIS DIFFERENTIAL INTERFEROMETER

LITHOGRAPHY SYSTEM AND METHOD FOR PROCESSING A TARGET, SUCH AS A WAFER

CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH ALIGNMENT SENSOR AND BEAM...

CAPACITIVE SENSING SYSTEM

LITHOGRAPHY SYSTEM FOR PROCESSING AT LEAST A PART OF A TARGET

LITHOGRAPHY SYSTEM FOR PROCESSING A TARGET, SUCH AS A WAFER, A METH...

LITHOGRAPHY SYSTEM FOR PROCESSING A TARGET, SUCH AS A WAFER, AND A...

POSITION DETERMINATION IN A LITHOGRAPHY SYSTEM USING A SUBSTRATE HA...

INTERFEROMETER MODULE

LITHOGRAPHY SYSTEM WITH DIFFERENTIAL INTERFEROMETER MODULE

ALIGNMENT OF AN INTERFEROMETER MODULE FOR USE IN AN EXPOSURE TOOL

EXPOSURE METHOD

CAPACITIVE SENSING SYSTEM WITH DIFFERENTIAL PAIRS

CAPACITIVE SENSING SYSTEM

INTEGRATED SENSOR SYSTEM