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Nigel P. Smith
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Hillsboro, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Sample surface polarization modification in interferometric defect...
Patent number
11,150,195
Issue date
Oct 19, 2021
Onto Innovation Inc.
Nigel P. Smith
G01 - MEASURING TESTING
Information
Patent Grant
Sample inspection using topography
Patent number
10,937,705
Issue date
Mar 2, 2021
Onto Innovation Inc.
Nigel P. Smith
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sub-resolution defect detection
Patent number
10,935,501
Issue date
Mar 2, 2021
Onto Innovation Inc.
Nigel P. Smith
G01 - MEASURING TESTING
Information
Patent Grant
Interferometer with pixelated phase shift mask
Patent number
10,830,709
Issue date
Nov 10, 2020
Onto Innovation Inc.
Nigel P. Smith
G01 - MEASURING TESTING
Information
Patent Grant
Scanning white-light interferometry system for characterization of...
Patent number
10,288,408
Issue date
May 14, 2019
Nanometrics Incorporated
Nigel P. Smith
G02 - OPTICS
Information
Patent Grant
Image based overlay measurement with finite gratings
Patent number
10,107,621
Issue date
Oct 23, 2018
Nanometrics Incorporated
Nigel P. Smith
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Diffraction based overlay linearity testing
Patent number
9,239,523
Issue date
Jan 19, 2016
Nanometrics Incorporated
Jie Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
SYSTEM AND METHOD FOR FAST MICROSCOPY
Publication number
20240337627
Publication date
Oct 10, 2024
ONTO INNOVATION INC.
Manjusha MEHENDALE
G01 - MEASURING TESTING
Information
Patent Application
MULTI-LAYER CALIBRATION FOR EMPIRICAL OVERLAY MEASUREMENT
Publication number
20220326626
Publication date
Oct 13, 2022
ONTO INNOVATION INC.
Nigel P. SMITH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SAMPLE SURFACE POLARIZATION MODIFICATION IN INTERFEROMETRIC DEFECT...
Publication number
20210088453
Publication date
Mar 25, 2021
ONTO INNOVATION INC.
Nigel P. SMITH
G01 - MEASURING TESTING
Information
Patent Application
INTERFEROMETER WITH PIXELATED PHASE SHIFT MASK
Publication number
20200103355
Publication date
Apr 2, 2020
ONTO INNOVATON INC.
Nigel P. SMITH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SAMPLE INSPECTION USING TOPOGRAPHY
Publication number
20190304851
Publication date
Oct 3, 2019
Nanometrics Incorporated
Nigel P. SMITH
G01 - MEASURING TESTING
Information
Patent Application
SUB-RESOLUTION DEFECT DETECTION
Publication number
20190170655
Publication date
Jun 6, 2019
Nanometrics Incorporated
Nigel P. Smith
G01 - MEASURING TESTING
Information
Patent Application
SCANNING WHITE-LIGHT INTERFEROMETRY SYSTEM FOR CHARACTERIZATION OF...
Publication number
20180156597
Publication date
Jun 7, 2018
Nanometrics Incorporated
Nigel P. Smith
G01 - MEASURING TESTING
Information
Patent Application
IMAGE BASED OVERLAY MEASUREMENT WITH FINITE GRATINGS
Publication number
20130208279
Publication date
Aug 15, 2013
Nanometrics Incorporated
Nigel P. Smith
G01 - MEASURING TESTING
Information
Patent Application
Diffraction Based Overlay Linearity Testing
Publication number
20110238365
Publication date
Sep 29, 2011
Nanometrics Incorporated
Jie Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY