Nigel R. Farrar

Person

  • Poway, CA, US

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Active Spectral Control of Optical Source

    • Publication number 20110205512
    • Publication date Aug 25, 2011
    • CYMER INC.
    • Nakgeuon Seong
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY