Nikhil MEHTA

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Stamford, CT, US

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Patents Grantslast 30 patents

Information Patent Grant
Metrology targets
- Patent number 11,982,946
- Issue date May 14, 2024
- ASML Netherlands B.V.
- Nikhil Mehta
- G01 - MEASURING TESTING
Information Patent Grant
Metrology system, lithographic apparatus, and calibration method
- Patent number 11,740,561
- Issue date Aug 29, 2023
- ASML Netherlands B.V.
- Nikhil Mehta
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
A METHOD FOR FILTERING AN IMAGE AND ASSOCIATED METROLOGY APPARATUS
- Publication number 20220350260
- Publication date Nov 3, 2022
- ASML Holding N.V.
- Armand Eugene Albert
- G01 - MEASURING TESTING
Information Patent Application
IMPROVEMENTS IN METROLOGY TARGETS
- Publication number 20220260929
- Publication date Aug 18, 2022
- ASML NETHERLANDS B.V.
- Nikhil MEHTA
- G01 - MEASURING TESTING
Information Patent Application
METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND CALIBRATION METHOD
- Publication number 20220197151
- Publication date Jun 23, 2022
- ASML NETHERLANDS B.V.
- Nikhil MEHTA
- G01 - MEASURING TESTING