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Niklas Bondestam
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Helsinki, FI
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus for fabrication of thin films
Patent number
7,833,352
Issue date
Nov 16, 2010
ASM International N.V
Niklas Bondestam
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Active reactant vapor pulse monitoring in a chemical reactor
Patent number
7,374,941
Issue date
May 20, 2008
ASM Iternational N.V.
Niklas Bondestam
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
ALD reactor and method with controlled wall temperature
Patent number
6,939,579
Issue date
Sep 6, 2005
ASM International N.V
Niklas Bondestam
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of monitoring evaporation rate of source material in a conta...
Patent number
6,779,378
Issue date
Aug 24, 2004
ASM International N.V
Niklas Bondestam
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for growing thin films
Patent number
6,630,030
Issue date
Oct 7, 2003
ASM Microchemistry Ltd.
Tuomo Suntola
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for fabrication of thin films
Patent number
6,579,374
Issue date
Jun 17, 2003
ASM Microchemistry Oy
Niklas Bondestam
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for fabrication of thin films
Patent number
6,562,140
Issue date
May 13, 2003
ASM Microchemistry Oy
Niklas Bondestam
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Active pulse monitoring in a chemical reactor
Publication number
20060281184
Publication date
Dec 14, 2006
Niklas Bondestam
C30 - CRYSTAL GROWTH
Information
Patent Application
Method of monitoring evaporation rate of source material in a conta...
Publication number
20040083787
Publication date
May 6, 2004
Niklas Bondestam
G01 - MEASURING TESTING
Information
Patent Application
Apparatus for fabrication of thin films
Publication number
20030150385
Publication date
Aug 14, 2003
Niklas Bondestam
C30 - CRYSTAL GROWTH
Information
Patent Application
Active pulse monitoring in a chemical reactor
Publication number
20030143747
Publication date
Jul 31, 2003
Niklas Bondestam
C30 - CRYSTAL GROWTH
Information
Patent Application
ALD reactor and method with controlled wall temperature
Publication number
20020157611
Publication date
Oct 31, 2002
Niklas Bondestam
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus for fabrication of thin films
Publication number
20010009140
Publication date
Jul 26, 2001
Niklas Bondestam
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...