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Niklas Svedin
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S-11432 Stockholm, SE
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Patents Grants
last 30 patents
Information
Patent Grant
Thin capping for MEMS devices
Patent number
9,718,674
Issue date
Aug 1, 2017
Silex Microsystems AB
Edvard Kalvesten
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Thin film capping
Patent number
9,511,999
Issue date
Dec 6, 2016
Silex Microsystems AB
Thorbjorn Ebefors
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Via structure and method thereof
Patent number
9,448,401
Issue date
Sep 20, 2016
Silex Microsystems AB
Thorbjörn Ebefors
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bonding process and bonded structures
Patent number
8,866,289
Issue date
Oct 21, 2014
Silex Microsystems AB
Thorbjorn Ebefors
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Via structure and method thereof
Patent number
8,729,713
Issue date
May 20, 2014
Silex Microsystems AB
Thorbjörn Ebefors
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bonding process and bonded structures
Patent number
8,729,685
Issue date
May 20, 2014
Silex Microsystems AB
Thorbjorn Ebefors
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Via structure and method thereof
Patent number
8,630,033
Issue date
Jan 14, 2014
Silex Microsystems AB
Thorbjörn Ebefors
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Via structure and method thereof
Patent number
8,592,981
Issue date
Nov 26, 2013
Silex Microsystems AB
Thorbjörn Ebefors
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bonding process and bonded structures
Patent number
8,485,416
Issue date
Jul 16, 2013
Silex Microsystems AB
Thorbjorn Ebefors
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electrical connections in substrates
Patent number
7,560,802
Issue date
Jul 14, 2009
Silex Microsystems AG
Edvard Kälvesten
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Deflectable microstructure and method of manufacturing the same thr...
Patent number
7,172,911
Issue date
Feb 6, 2007
Silex Microsystems AB
Edvard Kälvesten
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Lift force fluid flow sensor for measuring fluid flow velocities
Patent number
6,055,869
Issue date
May 2, 2000
Erik Stemme
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
THIN CAPPING FOR MEMS DEVICES
Publication number
20160207758
Publication date
Jul 21, 2016
Silex Microsystems AB
Edvard KALVESTEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
THIN FILM CAPPING
Publication number
20140346657
Publication date
Nov 27, 2014
Silex Microsystems AB
Thorbjorn Ebefors
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
VIA STRUCTURE AND METHOD THEREOF
Publication number
20140063580
Publication date
Mar 6, 2014
Silex Microsystems AB
Thorbjörn Ebefors
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
NOVEL BONDING PROCESS AND BONDED STRUCTURES
Publication number
20120112335
Publication date
May 10, 2012
Silex Microsystems AB
Thorbjörn Ebefors
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
NOVEL BONDING PROCESS AND BONDED STRUCTURES
Publication number
20120097733
Publication date
Apr 26, 2012
Silex Microsystems AB
Thorbjörn EBEFORS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
NOVEL BONDING PROCESS AND BONDED STRUCTURES
Publication number
20120076715
Publication date
Mar 29, 2012
Silex Microsystems AB
Thorbjörn Ebefors
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
VIA STRUCTURE AND METHOD THEREOF
Publication number
20120018852
Publication date
Jan 26, 2012
Silex Microsystems AB
Thorbjörn Ebefors
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
VIA STRUCTURE AND METHOD THEREOF
Publication number
20120018898
Publication date
Jan 26, 2012
Silex Microsystems AB
Thorbjörn Ebefors
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
VIA STRUCTURE AND METHOD THEREOF
Publication number
20120019886
Publication date
Jan 26, 2012
Silex Microsystems AB
Thorbjörn Ebefors
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Deflectable microstructure and method of manufacturing the same thr...
Publication number
20050124159
Publication date
Jun 9, 2005
Edvard Kalvesten
B81 - MICRO-STRUCTURAL TECHNOLOGY