Nikolay Artemiev

Person

Berkeley, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Soft x-ray optics with improved filtering
- Patent number 12,025,575
- Issue date Jul 2, 2024
- KLA Corporation
- Alexander Kuznetsov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Methods and systems for semiconductor metrology based on polychroma...
- Patent number 11,333,621
- Issue date May 17, 2022
- KLA-Tencor Corporation
- Daniel Wack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Soft x-ray optics with improved filtering
- Patent number 11,143,604
- Issue date Oct 12, 2021
- KLA Corporation
- Alexander Kuznetsov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Methods and systems for characterization of an x-ray beam with high...
- Patent number 11,073,487
- Issue date Jul 27, 2021
- KLA-Tencor Corporation
- Alexander Bykanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray zoom lens for small angle x-ray scatterometry
- Patent number 10,859,518
- Issue date Dec 8, 2020
- KLA-Tencor Corporation
- Nikolay Artemiev
- G01 - MEASURING TESTING
Information Patent Grant
Multilayer targets for calibration and alignment of X-ray based mea...
- Patent number 10,816,486
- Issue date Oct 27, 2020
- KLA-Tencor Corporation
- Nikolay Artemiev
- G01 - MEASURING TESTING
Information Patent Grant
Calibration of a small angle X-ray scatterometry based metrology sy...
- Patent number 10,481,111
- Issue date Nov 19, 2019
- KLA-Tencor Corporation
- John Hench
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Beam shaping slit for small spot size transmission small angle X-ra...
- Patent number 10,359,377
- Issue date Jul 23, 2019
- KLA-Tencor Corporation
- Alexander Bykanov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
Soft X-Ray Optics With Improved Filtering
- Publication number 20240288388
- Publication date Aug 29, 2024
- KLA Corporation
- Alexander Kuznetsov
- G01 - MEASURING TESTING
Information Patent Application
Soft X-Ray Optics With Improved Filtering
- Publication number 20210404979
- Publication date Dec 30, 2021
- KLA Corporation
- Alexander Kuznetsov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Soft X-Ray Optics With Improved Filtering
- Publication number 20210310968
- Publication date Oct 7, 2021
- KLA Corporation
- Alexander Kuznetsov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Multilayer Targets For Calibration And Alignment Of X-Ray Based Mea...
- Publication number 20190302039
- Publication date Oct 3, 2019
- KLA-Tencor Corporation
- Nikolay Artemiev
- G01 - MEASURING TESTING
Information Patent Application
Methods And Systems For Semiconductor Metrology Based On Polychroma...
- Publication number 20190017946
- Publication date Jan 17, 2019
- KLA-Tencor Corporation
- Daniel Wack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods And Systems For Characterization Of An X-Ray Beam With High...
- Publication number 20180328868
- Publication date Nov 15, 2018
- KLA-Tencor Corporation
- Alexander Bykanov
- G01 - MEASURING TESTING
Information Patent Application
X-Ray Zoom Lens For Small Angle X-Ray Scatterometry
- Publication number 20180188192
- Publication date Jul 5, 2018
- KLA-Tencor Corporation
- Nikolay Artemiev
- G01 - MEASURING TESTING
Information Patent Application
Calibration Of A Small Angle X-Ray Scatterometry Based Metrology Sy...
- Publication number 20180113084
- Publication date Apr 26, 2018
- KLA-Tencor Corporation
- John Hench
- G01 - MEASURING TESTING
Information Patent Application
Beam Shaping Slit For Small Spot Size Transmission Small Angle X-Ra...
- Publication number 20170307548
- Publication date Oct 26, 2017
- KLA-Tencor Corporation
- Alexander Bykanov
- G01 - MEASURING TESTING

Nikolay Artemiev

Person

Patents Grantslast 30 patents

Soft x-ray optics with improved filtering

Methods and systems for semiconductor metrology based on polychroma...

Soft x-ray optics with improved filtering

Methods and systems for characterization of an x-ray beam with high...

X-ray zoom lens for small angle x-ray scatterometry

Multilayer targets for calibration and alignment of X-ray based mea...

Calibration of a small angle X-ray scatterometry based metrology sy...

Beam shaping slit for small spot size transmission small angle X-ra...

Patents Applicationslast 30 patents

Soft X-Ray Optics With Improved Filtering

Soft X-Ray Optics With Improved Filtering

Soft X-Ray Optics With Improved Filtering

Multilayer Targets For Calibration And Alignment Of X-Ray Based Mea...

Methods And Systems For Semiconductor Metrology Based On Polychroma...

Methods And Systems For Characterization Of An X-Ray Beam With High...

X-Ray Zoom Lens For Small Angle X-Ray Scatterometry

Calibration Of A Small Angle X-Ray Scatterometry Based Metrology Sy...

Beam Shaping Slit For Small Spot Size Transmission Small Angle X-Ra...