Membership
Tour
Register
Log in
Nikolay Artemiev
Follow
Person
Berkeley, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Methods and systems for semiconductor metrology based on polychroma...
Patent number
11,333,621
Issue date
May 17, 2022
KLA-Tencor Corporation
Daniel Wack
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Soft x-ray optics with improved filtering
Patent number
11,143,604
Issue date
Oct 12, 2021
KLA Corporation
Alexander Kuznetsov
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Methods and systems for characterization of an x-ray beam with high...
Patent number
11,073,487
Issue date
Jul 27, 2021
KLA-Tencor Corporation
Alexander Bykanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
X-ray zoom lens for small angle x-ray scatterometry
Patent number
10,859,518
Issue date
Dec 8, 2020
KLA-Tencor Corporation
Nikolay Artemiev
G01 - MEASURING TESTING
Information
Patent Grant
Multilayer targets for calibration and alignment of X-ray based mea...
Patent number
10,816,486
Issue date
Oct 27, 2020
KLA-Tencor Corporation
Nikolay Artemiev
G01 - MEASURING TESTING
Information
Patent Grant
Calibration of a small angle X-ray scatterometry based metrology sy...
Patent number
10,481,111
Issue date
Nov 19, 2019
KLA-Tencor Corporation
John Hench
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Beam shaping slit for small spot size transmission small angle X-ra...
Patent number
10,359,377
Issue date
Jul 23, 2019
KLA-Tencor Corporation
Alexander Bykanov
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
Information
Patent Application
Soft X-Ray Optics With Improved Filtering
Publication number
20210404979
Publication date
Dec 30, 2021
KLA Corporation
Alexander Kuznetsov
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
Soft X-Ray Optics With Improved Filtering
Publication number
20210310968
Publication date
Oct 7, 2021
KLA Corporation
Alexander Kuznetsov
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
Multilayer Targets For Calibration And Alignment Of X-Ray Based Mea...
Publication number
20190302039
Publication date
Oct 3, 2019
KLA-Tencor Corporation
Nikolay Artemiev
G01 - MEASURING TESTING
Information
Patent Application
Methods And Systems For Semiconductor Metrology Based On Polychroma...
Publication number
20190017946
Publication date
Jan 17, 2019
KLA-Tencor Corporation
Daniel Wack
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods And Systems For Characterization Of An X-Ray Beam With High...
Publication number
20180328868
Publication date
Nov 15, 2018
KLA-Tencor Corporation
Alexander Bykanov
G01 - MEASURING TESTING
Information
Patent Application
X-Ray Zoom Lens For Small Angle X-Ray Scatterometry
Publication number
20180188192
Publication date
Jul 5, 2018
KLA-Tencor Corporation
Nikolay Artemiev
G01 - MEASURING TESTING
Information
Patent Application
Calibration Of A Small Angle X-Ray Scatterometry Based Metrology Sy...
Publication number
20180113084
Publication date
Apr 26, 2018
KLA-Tencor Corporation
John Hench
G01 - MEASURING TESTING
Information
Patent Application
Beam Shaping Slit For Small Spot Size Transmission Small Angle X-Ra...
Publication number
20170307548
Publication date
Oct 26, 2017
KLA-Tencor Corporation
Alexander Bykanov
G01 - MEASURING TESTING