Nikolay Ivanovich Chkhalo

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Nizhny Novgorod city, RU

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Patents Grantslast 30 patents

Information Patent Grant
EUV multilayer mirror with interlayer and lithographic apparatus us...
- Patent number 9,082,521
- Issue date Jul 14, 2015
- ASML Netherlands B.V.
- Denis Alexandrovich Glushkov
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MULTILAYER MIRROR AND LITHOGRAPHIC APPARATUS
- Publication number 20110292366
- Publication date Dec 1, 2011
- ASML Netherlands B.V.
- Denis Alexandrovich Glushkov
- G02 - OPTICS