Nikolay Korovin

Person

Phoenix, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for electrochemical planarization of a workpiece
- Patent number 8,268,135
- Issue date Sep 18, 2012
- Novellus Systems, Inc.
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of calibration and data evaluation for eddy current metrolog...
- Patent number 7,198,545
- Issue date Apr 3, 2007
- Novellus Systems, Inc.
- Robert J. Stoya
- B24 - GRINDING POLISHING
Information Patent Grant
Methods using eddy current for calibrating a CMP tool
- Patent number 7,189,140
- Issue date Mar 13, 2007
- Novellus Systems, Inc.
- John Shugrue
- B24 - GRINDING POLISHING
Information Patent Grant
Work piece carrier with adjustable pressure zones and barriers and...
- Patent number 7,140,956
- Issue date Nov 28, 2006
- SpeedFam-IPEC Corporation
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Work piece carrier with adjustable pressure zones and barriers and...
- Patent number 7,025,664
- Issue date Apr 11, 2006
- SpeedFam-IPEC Corporation
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Work piece carrier with adjustable pressure zones and barriers and...
- Patent number 7,014,541
- Issue date Mar 21, 2006
- SpeedFam-IPEC Corporation
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for electrochemical planarization of a workpiece
- Patent number 6,974,525
- Issue date Dec 13, 2005
- SpeedFam-IPEC Corporation
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods and apparatuses for conditioning polishing surfaces utilize...
- Patent number 6,953,382
- Issue date Oct 11, 2005
- Novellus Systems, Inc.
- Nikolay Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Dynamic polishing fluid delivery system for a rotational polishing...
- Patent number 6,951,597
- Issue date Oct 4, 2005
- Novellus Systems, Inc.
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Method for controlling a chemical mechanical polishing (CMP) operation
- Patent number 6,932,671
- Issue date Aug 23, 2005
- Novellus Systems, Inc.
- Nikolay Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Method for processing a work piece in a multi-zonal processing appa...
- Patent number 6,790,123
- Issue date Sep 14, 2004
- SpeedFam-IPEC Corporation
- Nikolay Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for electrochemical planarization of a workpiece
- Patent number 6,736,952
- Issue date May 18, 2004
- SpeedFam-IPEC Corporation
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Work piece carrier with adjustable pressure zones and barriers and...
- Patent number 6,659,850
- Issue date Dec 9, 2003
- SpeedFam-IPEC Corporation
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Workpiece carrier with adjustable pressure zones and barriers
- Patent number 6,612,903
- Issue date Sep 2, 2003
- SpeedFam-IPEC Corporation
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Method for controlling a process in a multi-zonal apparatus
- Patent number 6,582,277
- Issue date Jun 24, 2003
- SpeedFam-IPEC Corporation
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for electrochemically depositing a material on...
- Patent number 6,572,755
- Issue date Jun 3, 2003
- SpeedFam-IPEC Corporation
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method to determine optimum geometry of a multizone carrier
- Patent number 6,544,103
- Issue date Apr 8, 2003
- SpeedFam-IPEC Corporation
- Nikolay Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Multi-zone pressure control carrier
- Patent number 6,508,694
- Issue date Jan 21, 2003
- SpeedFam-IPEC Corporation
- Nikolay Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Process for monitoring a process, planarizing a surface, and for qu...
- Patent number 6,503,767
- Issue date Jan 7, 2003
- SpeedFam-IPEC Corporation
- Nikolay Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Method to mathematically characterize a multizone carrier
- Patent number 6,468,131
- Issue date Oct 22, 2002
- SpeedFam-IPEC Corporation
- Nikolay Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Workpiece carrier with adjustable pressure zones and barriers
- Patent number 6,390,905
- Issue date May 21, 2002
- SpeedFam-IPEC Corporation
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier having pistons for distributing a pressing force on the bac...
- Patent number 6,336,853
- Issue date Jan 8, 2002
- SpeedFam-IPEC Corporation
- Stephen C. Schultz
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR ELECTROCHEMICAL PLANARIZATION OF A WORKPIECE
- Publication number 20060081460
- Publication date Apr 20, 2006
- SpeedFam-IPEC Corporation
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Dynamic polishing fluid delivery system for a rotational polishing...
- Publication number 20050092434
- Publication date May 5, 2005
- Nikolay N. Korovin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
INTEGRATED PRESSURE CONTROL SYSTEM FOR WORKPIECE CARRIER
- Publication number 20050070205
- Publication date Mar 31, 2005
- SpeedFam-IPEC Corporation
- Nikolay Korovin
- B24 - GRINDING POLISHING
Information Patent Application
Work piece carrier with adjustable pressure zones and barriers and...
- Publication number 20040259476
- Publication date Dec 23, 2004
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR ELECTROCHEMICAL PLANARIZATION OF A WORKPIECE
- Publication number 20040195110
- Publication date Oct 7, 2004
- SpeedFam-IPEC Corporation
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Work piece carrier with adjustable pressure zones and barriers and...
- Publication number 20040067717
- Publication date Apr 8, 2004
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Application
Method for processing a work piece in a multi-zonal processing appa...
- Publication number 20030216104
- Publication date Nov 20, 2003
- Nikolay Korovin
- B24 - GRINDING POLISHING
Information Patent Application
Front-reference carrier on orbital solid platen
- Publication number 20030077986
- Publication date Apr 24, 2003
- SpeedFam-IPEC Corporation
- Stephen C. Schultz
- B24 - GRINDING POLISHING
Information Patent Application
Method for controlling a process in a multi-zonal apparatus
- Publication number 20020164924
- Publication date Nov 7, 2002
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for electrochemically depositing a material on...
- Publication number 20020148732
- Publication date Oct 17, 2002
- Ismail Emesh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Work piece carrier with adjustable pressure zones and barriers and...
- Publication number 20020111122
- Publication date Aug 15, 2002
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for electrochemical planarization of a workpiece
- Publication number 20020108861
- Publication date Aug 15, 2002
- Ismail Emesh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Multi-zone pressure control carrier
- Publication number 20020094759
- Publication date Jul 18, 2002
- SpeedFam-IPEC Corporation
- Nikolay Korovin
- B24 - GRINDING POLISHING
Information Patent Application
Process for monitoring a process, planarizing a surface, and for qu...
- Publication number 20020086531
- Publication date Jul 4, 2002
- Nikolay Korovin
- B24 - GRINDING POLISHING
Information Patent Application
Workpiece carrier with adjustable pressure zones and barriers
- Publication number 20020061716
- Publication date May 23, 2002
- SpeedFam-IPEC Corporation
- Nikolay N. Korovin
- B24 - GRINDING POLISHING

Nikolay Korovin

Person

Patents Grantslast 30 patents

Method and apparatus for electrochemical planarization of a workpiece

Method of calibration and data evaluation for eddy current metrolog...

Methods using eddy current for calibrating a CMP tool

Work piece carrier with adjustable pressure zones and barriers and...

Work piece carrier with adjustable pressure zones and barriers and...

Work piece carrier with adjustable pressure zones and barriers and...

Method and apparatus for electrochemical planarization of a workpiece

Methods and apparatuses for conditioning polishing surfaces utilize...

Dynamic polishing fluid delivery system for a rotational polishing...

Method for controlling a chemical mechanical polishing (CMP) operation

Method for processing a work piece in a multi-zonal processing appa...

Method and apparatus for electrochemical planarization of a workpiece

Work piece carrier with adjustable pressure zones and barriers and...

Workpiece carrier with adjustable pressure zones and barriers

Method for controlling a process in a multi-zonal apparatus

Method and apparatus for electrochemically depositing a material on...

Method to determine optimum geometry of a multizone carrier

Multi-zone pressure control carrier

Process for monitoring a process, planarizing a surface, and for qu...

Method to mathematically characterize a multizone carrier

Workpiece carrier with adjustable pressure zones and barriers

Carrier having pistons for distributing a pressing force on the bac...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR ELECTROCHEMICAL PLANARIZATION OF A WORKPIECE

Dynamic polishing fluid delivery system for a rotational polishing...

INTEGRATED PRESSURE CONTROL SYSTEM FOR WORKPIECE CARRIER

Work piece carrier with adjustable pressure zones and barriers and...

METHOD AND APPARATUS FOR ELECTROCHEMICAL PLANARIZATION OF A WORKPIECE

Work piece carrier with adjustable pressure zones and barriers and...

Method for processing a work piece in a multi-zonal processing appa...

Front-reference carrier on orbital solid platen

Method for controlling a process in a multi-zonal apparatus

Method and apparatus for electrochemically depositing a material on...

Work piece carrier with adjustable pressure zones and barriers and...

Method and apparatus for electrochemical planarization of a workpiece

Multi-zone pressure control carrier

Process for monitoring a process, planarizing a surface, and for qu...

Workpiece carrier with adjustable pressure zones and barriers