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Nikolay Sherbak
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Moscow, RU
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last 30 patents
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Patent Grant
System and method for pumping laser sustained plasma with an illumi...
Patent number
11,921,297
Issue date
Mar 5, 2024
KLA Corporation
Ilya Bezel
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
System and method for pumping laser sustained plasma with an illumi...
Patent number
11,262,591
Issue date
Mar 1, 2022
KLA Corporation
Ilya Bezel
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SYSTEM AND METHOD FOR PUMPING LASER SUSTAINED PLASMA WITH AN ILLUMI...
Publication number
20220187610
Publication date
Jun 16, 2022
Ilya Bezel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and Method for Pumping Laser Sustained Plasma with an Illumi...
Publication number
20200150445
Publication date
May 14, 2020
KLA-Tencor Corporation
Ilya Bezel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR