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Nils Johansson
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Los Gatos, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method for in-situ endpoint detection for semiconduct...
Patent number
8,795,029
Issue date
Aug 5, 2014
Applied Materials, Inc.
Manoocher Birang
B24 - GRINDING POLISHING
Information
Patent Grant
Friction sensor for polishing system
Patent number
8,758,086
Issue date
Jun 24, 2014
Applied Materials, Inc.
Gabriel Lorimer Miller
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and method for in-situ endpoint detection for chemical me...
Patent number
8,506,356
Issue date
Aug 13, 2013
Applied Materials, Inc.
Manoocher Birang
B24 - GRINDING POLISHING
Information
Patent Grant
Friction sensor for polishing system
Patent number
8,342,906
Issue date
Jan 1, 2013
Applied Materials, Inc.
Gabriel Lorimer Miller
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and method for in-situ endpoint detection for chemical me...
Patent number
7,775,852
Issue date
Aug 17, 2010
Applied Materials, Inc.
Manoocher Birang
B24 - GRINDING POLISHING
Information
Patent Grant
Integrated endpoint detection system with optical and eddy current...
Patent number
7,682,221
Issue date
Mar 23, 2010
Applied Materials, Inc.
Boguslaw A. Swedek
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing endpoint detection system and method using friction sensor
Patent number
7,513,818
Issue date
Apr 7, 2009
Applied Materials, Inc.
Gabriel Lorimer Miller
B24 - GRINDING POLISHING
Information
Patent Grant
Data processing for monitoring chemical mechanical polishing
Patent number
7,500,901
Issue date
Mar 10, 2009
Applied Materials, Inc.
Boguslaw A. Swedek
B24 - GRINDING POLISHING
Information
Patent Grant
Monitoring a metal layer during chemical mechanical polishing
Patent number
7,229,340
Issue date
Jun 12, 2007
Applied Materials, Inc.
Hiroji Hanawa
B24 - GRINDING POLISHING
Information
Patent Grant
Integrated endpoint detection system with optical and eddy current...
Patent number
7,195,536
Issue date
Mar 27, 2007
Applied Materials, Inc.
Boguslaw A Swedek
B24 - GRINDING POLISHING
Information
Patent Grant
System and method for in-line metal profile measurement
Patent number
7,101,254
Issue date
Sep 5, 2006
Applied Materials, Inc.
Boguslaw A Swedek
B24 - GRINDING POLISHING
Information
Patent Grant
Determination of position of sensor measurements during polishing
Patent number
7,097,537
Issue date
Aug 29, 2006
Applied Materials, Inc.
Jeffrey Drue David
B24 - GRINDING POLISHING
Information
Patent Grant
Data processing for monitoring chemical mechanical polishing
Patent number
7,008,296
Issue date
Mar 7, 2006
Applied Materials, Inc.
Boguslaw A. Swedek
B24 - GRINDING POLISHING
Information
Patent Grant
Combined eddy current sensing and optical monitoring for chemical m...
Patent number
7,008,297
Issue date
Mar 7, 2006
Applied Materials Inc.
Nils Johansson
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for monitoring a metal layer during chemical m...
Patent number
7,001,246
Issue date
Feb 21, 2006
Applied Materials Inc.
Hiroji Hanawa
B24 - GRINDING POLISHING
Information
Patent Grant
Eddy current sensing of metal removal for chemical mechanical polis...
Patent number
6,975,107
Issue date
Dec 13, 2005
Applied Materials, Inc.
Hiroji Hanawa
B24 - GRINDING POLISHING
Information
Patent Grant
Integrated endpoint detection system with optical and eddy current...
Patent number
6,966,816
Issue date
Nov 22, 2005
Applied Materials, Inc.
Boguslaw A Swedek
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing apparatus with non-conductive elements
Patent number
6,945,845
Issue date
Sep 20, 2005
Applied Materials, Inc.
Doyle E Bennett
B24 - GRINDING POLISHING
Information
Patent Grant
Method for monitoring a metal layer during chemical mechanical poli...
Patent number
6,930,478
Issue date
Aug 16, 2005
Applied Materials, Inc.
Hiroji Hanawa
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for monitoring a metal layer during chemical m...
Patent number
6,924,641
Issue date
Aug 2, 2005
Applied Materials, Inc.
Hiroji Hanawa
B24 - GRINDING POLISHING
Information
Patent Grant
Combined eddy current sensing and optical monitoring for chemical m...
Patent number
6,878,038
Issue date
Apr 12, 2005
Applied Materials Inc.
Nils Johansson
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for monitoring a metal layer during chemical mechanical p...
Patent number
6,878,036
Issue date
Apr 12, 2005
Applied Materials, Inc.
Hiroji Hanawa
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and method for in-situ endpoint detection for chemical me...
Patent number
6,876,454
Issue date
Apr 5, 2005
Applied Materials, Inc.
Manoocher Birang
B24 - GRINDING POLISHING
Information
Patent Grant
Monitoring substrate processing using reflected radiation
Patent number
6,831,742
Issue date
Dec 14, 2004
Applied Materials, Inc.
Zhifeng Sui
G01 - MEASURING TESTING
Information
Patent Grant
Endpoint detection in substrate fabrication processes
Patent number
6,813,534
Issue date
Nov 2, 2004
Zhifeng Sui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for in-line metal profile measurement
Patent number
6,811,466
Issue date
Nov 2, 2004
Applied Materials, Inc.
Boguslaw A Swedek
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and method for in-situ endpoint detection for chemical me...
Patent number
6,719,818
Issue date
Apr 13, 2004
Applied Materials, Inc.
Manoocher Birang
B24 - GRINDING POLISHING
Information
Patent Grant
Method for in-situ endpoint detection for chemical mechanical polis...
Patent number
6,537,133
Issue date
Mar 25, 2003
Applied Materials, Inc.
Manoocher Birang
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and method for endpoint control and plasma monitoring
Patent number
6,535,779
Issue date
Mar 18, 2003
Applied Materials, Inc.
Manush Birang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for detecting polishing endpoint with optical...
Patent number
6,399,501
Issue date
Jun 4, 2002
Applied Materials, Inc.
Manoocher Birang
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
FRICTION SENSOR FOR POLISHING SYSTEM
Publication number
20130167614
Publication date
Jul 4, 2013
Gabriel Lorimer Miller
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS AND METHOD FOR IN-SITU ENDPOINT DETECTION FOR SEMICONDUCT...
Publication number
20130130413
Publication date
May 23, 2013
Manoocher Birang
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS AND METHOD FOR IN-SITU ENDPOINT DETECTION FOR CHEMICAL ME...
Publication number
20100297917
Publication date
Nov 25, 2010
Manoocher Birang
B24 - GRINDING POLISHING
Information
Patent Application
FRICTION SENSOR FOR POLISHING SYSTEM
Publication number
20090253351
Publication date
Oct 8, 2009
APPLIED MATERIALS, INC.
Gabriel Lorimer Miller
B24 - GRINDING POLISHING
Information
Patent Application
MONITORING A METAL LAYER DURING CHEMICAL MECHANICAL POLISHING
Publication number
20070212987
Publication date
Sep 13, 2007
Hiroji Hanawa
B24 - GRINDING POLISHING
Information
Patent Application
INTEGRATED ENDPOINT DETECTION SYSTEM WITH OPTICAL AND EDDY CURRENT...
Publication number
20070135958
Publication date
Jun 14, 2007
Applied Materials, Inc.
Boguslaw A. Swedek
B24 - GRINDING POLISHING
Information
Patent Application
In-situ substrate imaging
Publication number
20070077671
Publication date
Apr 5, 2007
Applied Materials
Jeffrey Drue David
B24 - GRINDING POLISHING
Information
Patent Application
Apparatus and Method for In-Situ Endpoint Detection for Chemical Me...
Publication number
20070015441
Publication date
Jan 18, 2007
Applied Materials, Inc.
Manoocher Birang
B24 - GRINDING POLISHING
Information
Patent Application
System and method for in-line metal profile measurement
Publication number
20060246822
Publication date
Nov 2, 2006
Applied Materials, Inc. a Delaware Corporation
Boguslaw A. Swedek
B24 - GRINDING POLISHING
Information
Patent Application
Monitoring a metal layer during chemical mechanical polishing
Publication number
20060154570
Publication date
Jul 13, 2006
Hiroji Hanawa
B24 - GRINDING POLISHING
Information
Patent Application
Chemical mechanical polishing apparatus with non-conductive elements
Publication number
20060009132
Publication date
Jan 12, 2006
Doyle E. Bennett
B24 - GRINDING POLISHING
Information
Patent Application
Eddy current sensing of metal removal for chemical mechanical polis...
Publication number
20060009128
Publication date
Jan 12, 2006
Hiroji Hanawa
B24 - GRINDING POLISHING
Information
Patent Application
Data processing for monitoring chemical mechanical polishing
Publication number
20060009131
Publication date
Jan 12, 2006
Applied Materials, Inc., a Delaware corporation
Boguslaw A. Swedek
B24 - GRINDING POLISHING
Information
Patent Application
Integrated endpoint detection system with optical and eddy current...
Publication number
20050287929
Publication date
Dec 29, 2005
Applied Materials, Inc., a Delwaware corporation
Boguslaw A. Swedek
B24 - GRINDING POLISHING
Information
Patent Application
Apparatus and method for in-situ endpoint detection for chemical me...
Publication number
20050170751
Publication date
Aug 4, 2005
Applied Materials, Inc. a Delaware Corporation
Manoocher Birang
B24 - GRINDING POLISHING
Information
Patent Application
Combined eddy current sensing and optical monitoring for chemical m...
Publication number
20050101224
Publication date
May 12, 2005
Nils Johansson
B24 - GRINDING POLISHING
Information
Patent Application
System and method for in-line metal profile measurement
Publication number
20050048874
Publication date
Mar 3, 2005
Applied Materials, Inc., a Delaware corporation
Boguslaw A. Swedek
B24 - GRINDING POLISHING
Information
Patent Application
Data processing for monitoring chemical mechanical polishing
Publication number
20040259470
Publication date
Dec 23, 2004
APPLIED MATERIALS, INC.
Boguslaw A. Swedek
B24 - GRINDING POLISHING
Information
Patent Application
Chemical mechanical polishing apparatus with non-conductive elements
Publication number
20040176014
Publication date
Sep 9, 2004
Doyle E. Bennett
B24 - GRINDING POLISHING
Information
Patent Application
Apparatus and method for in-situ endpoint detection for chemical me...
Publication number
20040014395
Publication date
Jan 22, 2004
Applied Materials, Inc., a Delaware corporation
Manoocher Birang
B24 - GRINDING POLISHING
Information
Patent Application
Apparatus for monitoring a metal layer during chemical mechanical p...
Publication number
20030216105
Publication date
Nov 20, 2003
APPLIED MATERIALS, INC.
Hiroji Hanawa
B24 - GRINDING POLISHING
Information
Patent Application
Method for monitoring a metal layer during chemical mechanical poli...
Publication number
20030206010
Publication date
Nov 6, 2003
APPLIED MATERIALS, INC.
Hiroji Hanawa
B24 - GRINDING POLISHING
Information
Patent Application
Method for monitoring a metal layer during chemical mechanical poli...
Publication number
20030201769
Publication date
Oct 30, 2003
APPLIED MATERIALS, INC.
Hiroji Hanawa
B24 - GRINDING POLISHING
Information
Patent Application
Method and apparatus for monitoring a metal layer during chemical m...
Publication number
20030201770
Publication date
Oct 30, 2003
APPLIED MATERIALS, INC.
Hiroji Hanawa
B24 - GRINDING POLISHING
Information
Patent Application
Endpoint detection in substrate fabrication processes
Publication number
20020183977
Publication date
Dec 5, 2002
APPLIED MATERIALS, INC.
Zhifeng Sui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Integrated endpoint detection system with optical and eddy current...
Publication number
20020164925
Publication date
Nov 7, 2002
APPLIED MATERIALS, INC.
Boguslaw A. Swedek
G01 - MEASURING TESTING
Information
Patent Application
Combined eddy current sensing and optical monitoring for chemical m...
Publication number
20020077031
Publication date
Jun 20, 2002
Nils Johansson
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND APPARATUS FOR DETECTING POLISHING ENDPOINT WITH OPTICAL...
Publication number
20020016066
Publication date
Feb 7, 2002
MANOOCHER BIRANG
B24 - GRINDING POLISHING