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Nils Kummer
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Ludwigsburg, DE
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Patents Grants
last 30 patents
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Patent Grant
Method for producing three-dimensional structures by means of an et...
Patent number
6,663,784
Issue date
Dec 16, 2003
Robert Bosch GmbH
Nils Kummer
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Device for one-sided etching of a semiconductor wafer
Patent number
5,324,410
Issue date
Jun 28, 1994
Robert Bosch GmbH
Nils Kummer
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Microstructured infrared sensor and method for its manufacture
Publication number
20060016995
Publication date
Jan 26, 2006
Nils Kummer
G01 - MEASURING TESTING