Nina Vladimirovna DZIOMKINA

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San Diego, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Cleaning a structure surface in an EUV chamber
- Patent number 12,189,313
- Issue date Jan 7, 2025
- ASML Netherlands B.V.
- Chunguang Xia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning a structure surface in an EUV chamber
- Patent number 11,347,154
- Issue date May 31, 2022
- ASML Netherlands B.V.
- Chunguang Xia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System, a lithographic apparatus, and a method for reducing oxidati...
- Patent number 11,086,238
- Issue date Aug 10, 2021
- ASML Netherlands B.V.
- Lucas Henricus Johannes Stevens
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CLEANING A STRUCTURE SURFACE IN AN EUV CHAMBER
- Publication number 20220179328
- Publication date Jun 9, 2022
- ASML NETHERLANDS B.V.
- Chunguang Xia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING A STRUCTURE SURFACE IN AN EUV CHAMBER
- Publication number 20210063899
- Publication date Mar 4, 2021
- Chunguang Xia
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A SYSTEM, A LITHOGRAPHIC APPARATUS, AND A METHOD FOR REDUCING OXIDA...
- Publication number 20200150549
- Publication date May 14, 2020
- ASML NETHERLANDS B.V.
- Lucas Henricus Johannes STEVENS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY