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Ning Chen
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Methods and apparatus for cleaning chamber components
Patent number
7,789,969
Issue date
Sep 7, 2010
Applied Materials, Inc.
Felix Rabinovich
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cleaning process and apparatus for silicate materials
Patent number
7,452,475
Issue date
Nov 18, 2008
Applied Materials, Inc.
Samantha S. H. Tan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ultrasonic assisted etch using corrosive liquids
Patent number
7,377,991
Issue date
May 27, 2008
Applied Materials, Inc.
Samantha Tan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ultrasonic assisted etch using corrosive liquids
Patent number
7,091,132
Issue date
Aug 15, 2006
Applied Materials, Inc.
Samantha Tan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cleaning process and apparatus for silicate materials
Patent number
7,045,072
Issue date
May 16, 2006
Samantha S. H. Tan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHODS AND APPARATUS FOR CLEANING CHAMBER COMPONENTS
Publication number
20080099054
Publication date
May 1, 2008
FELIX RABINOVICH
B08 - CLEANING
Information
Patent Application
Ultrasonic assisted etch using corrosive liquids
Publication number
20060243390
Publication date
Nov 2, 2006
Samantha Tan
B08 - CLEANING
Information
Patent Application
Cleaning process and apparatus for silicate materials
Publication number
20050167393
Publication date
Aug 4, 2005
Samantha S. H. Tan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Cleaning process and apparatus for silicate materials
Publication number
20050016958
Publication date
Jan 27, 2005
Samantha S. H. Tan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Ultrasonic assisted etch using corrosive liquids
Publication number
20050016959
Publication date
Jan 27, 2005
Samantha Tan
B08 - CLEANING