Nini Munoz

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Ithaca, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
In situ control of ion angular distribution in a processing apparatus
- Patent number 9,620,335
- Issue date Apr 11, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for dynamic control of ion beam energy and angle
- Patent number 9,336,998
- Issue date May 10, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In situ control of ion angular distribution in a processing apparatus
- Patent number 9,293,301
- Issue date Mar 22, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
IN SITU CONTROL OF ION ANGULAR DISTRIBUTION IN A PROCESSING APPARATUS
- Publication number 20160189935
- Publication date Jun 30, 2016
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR DYNAMIC CONTROL OF ION BEAM ENERGY AND ANGLE
- Publication number 20150325410
- Publication date Nov 12, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN SITU CONTROL OF ION ANGULAR DISTRIBUTION IN A PROCESSING APPARATUS
- Publication number 20150179409
- Publication date Jun 25, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS