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Ninko T. Mirkovich
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Novato, CA, US
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last 30 patents
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Patent Grant
Cassette elevator for use in a modular article processing machine
Patent number
4,861,222
Issue date
Aug 29, 1989
Tegal Corporation
Ninko T. Mirkovich
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modular article processing machine and method of article handling t...
Patent number
4,801,241
Issue date
Jan 31, 1989
Tegal Corporation
John Zajac
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer cassette having multi-directional access
Patent number
4,727,993
Issue date
Mar 1, 1988
Tegal Corporation
Ninko T. Mirkovich
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum load lock apparatus
Patent number
4,632,624
Issue date
Dec 30, 1986
Tegal Corporation
Ninko T. Mirkovich
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Article transport apparatus
Patent number
4,619,573
Issue date
Oct 28, 1986
Tegal Corporation
Thomas M. Rathmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma reactor chuck assembly
Patent number
4,547,247
Issue date
Oct 15, 1985
Tegal Corporation
Douglas H. Warenback
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...