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Niraj Rana
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West Linn, OR, US
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last 30 patents
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Patent Grant
Asymmetric wafer bow compensation by chemical vapor deposition
Patent number
10,903,070
Issue date
Jan 26, 2021
Lam Research Corporation
Chanyuan Liu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
HIGH TEMPERATURE PEDESTAL WITH EXTENDED ELECTROSTATIC CHUCK ELECTRODE
Publication number
20230369091
Publication date
Nov 16, 2023
LAM RESEARCH CORPORATION
Feng BI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DETECTION AND LOCATION OF ANOMALOUS PLASMA EVENTS IN FABRICATION CH...
Publication number
20220406578
Publication date
Dec 22, 2022
LAM RESEARCH CORPORATION
Yukinori Sakiyama
G01 - MEASURING TESTING
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Patent Application
ASYMMETRIC WAFER BOW COMPENSATION BY CHEMICAL VAPOR DEPOSITION
Publication number
20200105523
Publication date
Apr 2, 2020
LAM RESEARCH CORPORATION
Chanyuan Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...