Nitin Khurana

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
High-temperature chamber and chamber component cleaning and mainten...
- Patent number 11,837,448
- Issue date Dec 5, 2023
- Applied Materials, Inc.
- Shuran Sheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process kit erosion and service life prediction
- Patent number 10,770,321
- Issue date Sep 8, 2020
- Applied Materials, Inc.
- Kang-Lie Chiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process kit erosion and service life prediction
- Patent number 10,177,018
- Issue date Jan 8, 2019
- Applied Materials, Inc.
- Kang-Lie Chiang
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for cleaning substrates
- Patent number 6,908,865
- Issue date Jun 21, 2005
- Applied Materials, Inc.
- Martin Kranz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nitrogen treatment of a metal nitride/metal stack
- Patent number 6,436,819
- Issue date Aug 20, 2002
- Applied Materials, Inc.
- Zhi-Fan Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Direct temperature control for a component of a substrate processin...
- Patent number 6,433,314
- Issue date Aug 13, 2002
- Applied Materials, Inc.
- Tushar Mandrekar
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for sputter etch conditioning a ceramic body
- Patent number 6,395,157
- Issue date May 28, 2002
- Applied Materials, Inc.
- Nitin Khurana
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for superior step coverage and interface control for high K...
- Patent number 6,358,810
- Issue date Mar 19, 2002
- Applied Materials, Inc.
- Charles Dornfest
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater for processing chamber
- Patent number 6,350,320
- Issue date Feb 26, 2002
- Applied Materials, Inc.
- Semyon Sherstinsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for removing processing liquid from a processi...
- Patent number 6,345,642
- Issue date Feb 12, 2002
- Applied Materials, Inc.
- Ted G. Yoshidome
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Non-intrusive, on-the-fly (OTF) temperature measurement and monitor...
- Patent number 6,190,037
- Issue date Feb 20, 2001
- Applied Materials, Inc.
- Ashok Das
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for controlling cooling and heating fluids for...
- Patent number 6,117,245
- Issue date Sep 12, 2000
- Applied Materials, Inc.
- Tushar Mandrekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Continuous process for forming improved titanium nitride barrier la...
- Patent number 5,972,178
- Issue date Oct 26, 1999
- Applied Materials, Inc.
- Murali K. Narasimhan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modulating surface morphology of barrier layers
- Patent number 5,956,608
- Issue date Sep 21, 1999
- Applied Materials, Inc.
- Nitin Khurana
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for sputter etch conditioning a ceramic body
- Patent number 5,861,086
- Issue date Jan 19, 1999
- Applied Materials, Inc.
- Nitin Khurana
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable cell size collimator
- Patent number 5,650,052
- Issue date Jul 22, 1997
- Sergio Edelstein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Mobile Cart for Commissioning Semiconductor Processing Tool
- Publication number 20240404848
- Publication date Dec 5, 2024
- Sam KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-TEMPERATURE CHAMBER AND CHAMBER COMPONENT CLEANING AND MAINTEN...
- Publication number 20220344135
- Publication date Oct 27, 2022
- Applied Materials, Inc.
- Shuran SHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS KIT EROSION AND SERVICE LIFE PREDICTION
- Publication number 20190148194
- Publication date May 16, 2019
- Applied Materials, Inc.
- Kang-Lie CHIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS KIT EROSION AND SERVICE LIFE PREDICTION
- Publication number 20180047599
- Publication date Feb 15, 2018
- Applied Materials, Inc.
- Kang-Lie CHIANG
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE SUPPORT COMPONENTS HAVING QUARTZ CONTACT TIPS
- Publication number 20080105201
- Publication date May 8, 2008
- APPLIED MATERIALS, INC.
- TIMOTHY RONAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Contaminant reducing substrate transport and support system
- Publication number 20050252454
- Publication date Nov 17, 2005
- APPLIED MATERIALS, INC.
- Vijay D. Parkhe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for cleaning substrates
- Publication number 20030062333
- Publication date Apr 3, 2003
- APPLIED MATERIALS, INC.
- Martin Kranz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR SPUTTER ETCH CONDITIONING A CERAMIC BODY
- Publication number 20010040091
- Publication date Nov 15, 2001
- NITIN KHURANA
- H01 - BASIC ELECTRIC ELEMENTS

Nitin Khurana

Person

Patents Grantslast 30 patents

High-temperature chamber and chamber component cleaning and mainten...

Process kit erosion and service life prediction

Process kit erosion and service life prediction

Method and apparatus for cleaning substrates

Nitrogen treatment of a metal nitride/metal stack

Direct temperature control for a component of a substrate processin...

Method and apparatus for sputter etch conditioning a ceramic body

Method for superior step coverage and interface control for high K...

Heater for processing chamber

Method and apparatus for removing processing liquid from a processi...

Non-intrusive, on-the-fly (OTF) temperature measurement and monitor...

Method and apparatus for controlling cooling and heating fluids for...

Continuous process for forming improved titanium nitride barrier la...

Modulating surface morphology of barrier layers

Method and apparatus for sputter etch conditioning a ceramic body

Variable cell size collimator

Patents Applicationslast 30 patents

Mobile Cart for Commissioning Semiconductor Processing Tool

HIGH-TEMPERATURE CHAMBER AND CHAMBER COMPONENT CLEANING AND MAINTEN...

PROCESS KIT EROSION AND SERVICE LIFE PREDICTION

PROCESS KIT EROSION AND SERVICE LIFE PREDICTION

SUBSTRATE SUPPORT COMPONENTS HAVING QUARTZ CONTACT TIPS

Contaminant reducing substrate transport and support system

Method and apparatus for cleaning substrates

METHOD AND APPARATUS FOR SPUTTER ETCH CONDITIONING A CERAMIC BODY