Nitin PATHAK

Person

Bangalore, IN

People

Patents Grantslast 30 patents

Information Patent Grant
Cleaning assemblies for substrate processing chambers
- Patent number 12,012,653
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Yuxing Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing chambers and methods for cleaning the same
- Patent number 11,952,660
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardware to prevent bottom purge incursion in application volume an...
- Patent number 11,952,663
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Isolator apparatus and methods for substrate processing chambers
- Patent number 11,827,980
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Uniform in situ cleaning and deposition
- Patent number 11,742,185
- Issue date Aug 29, 2023
- Applied Materials, Inc.
- Saket Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardware to prevent bottom purge incursion in application volume an...
- Patent number 11,643,725
- Issue date May 9, 2023
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Isolator apparatus and methods for substrate processing chambers
- Patent number 11,492,705
- Issue date Nov 8, 2022
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas box for CVD chamber
- Patent number 11,049,699
- Issue date Jun 29, 2021
- Applied Materials, Inc.
- Tejas Ulavi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor design to reduce edge thermal peak
- Patent number 10,269,614
- Issue date Apr 23, 2019
- Applied Materials, Inc.
- Schubert S. Chu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBERS AND METHODS FOR CLEANING THE SAME
- Publication number 20240247371
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNIFORM IN SITU CLEANING AND DEPOSITION
- Publication number 20230402261
- Publication date Dec 14, 2023
- Applied Materials, Inc.
- Saket Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...
- Publication number 20230392259
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ISOLATOR APPARATUS AND METHODS FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20230047451
- Publication date Feb 16, 2023
- Applied Materials, Inc.
- Nitin PATHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING ASSEMBLIES FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20220307129
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Yuxing Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...
- Publication number 20220307135
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNIFORM IN SITU CLEANING AND DEPOSITION
- Publication number 20220310360
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Saket Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS TO ELIMINATE OF DEPOSITION ON WAFER BEVEL AND BACKSIDE
- Publication number 20220199373
- Publication date Jun 23, 2022
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DISTRIBUTION COMPONENTS FOR SEMICONDUCTOR PROCESSING SYSTEMS
- Publication number 20220028710
- Publication date Jan 27, 2022
- Applied Materials, Inc.
- Anantha K. Subramani
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
MULTIPLE PROCESS SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20220020615
- Publication date Jan 20, 2022
- Applied Materials, Inc.
- Nitin Pathak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BOTTOM PURGE FOR SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20210320017
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Nitin Pathak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBERS AND METHODS FOR CLEANING THE SAME
- Publication number 20210032747
- Publication date Feb 4, 2021
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ISOLATOR APPARATUS AND METHODS FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20210002763
- Publication date Jan 7, 2021
- Applied Materials, Inc.
- Nitin PATHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BAFFLE IMPLEMENTATION FOR IMPROVING BOTTOM PURGE GAS FLOW UNIFORMITY
- Publication number 20200388470
- Publication date Dec 10, 2020
- Applied Materials, Inc.
- Nitin PATHAK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS BOX FOR CVD CHAMBER
- Publication number 20200043704
- Publication date Feb 6, 2020
- Applied Materials, Inc.
- Tejas ULAVI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLAT SUSCEPTOR WITH GROOVES FOR MINIMIZING TEMPERATURE PROFILE ACRO...
- Publication number 20170175265
- Publication date Jun 22, 2017
- Applied Materials, Inc.
- Kartik SHAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUSCEPTOR DESIGN TO REDUCE EDGE THERMAL PEAK
- Publication number 20160133504
- Publication date May 12, 2016
- Applied Materials, Inc.
- Schubert S. CHU
- H01 - BASIC ELECTRIC ELEMENTS

Nitin PATHAK

Person

Patents Grantslast 30 patents

Cleaning assemblies for substrate processing chambers

Semiconductor processing chambers and methods for cleaning the same

Hardware to prevent bottom purge incursion in application volume an...

Isolator apparatus and methods for substrate processing chambers

Uniform in situ cleaning and deposition

Hardware to prevent bottom purge incursion in application volume an...

Isolator apparatus and methods for substrate processing chambers

Gas box for CVD chamber

Susceptor design to reduce edge thermal peak

Patents Applicationslast 30 patents

SEMICONDUCTOR PROCESSING CHAMBERS AND METHODS FOR CLEANING THE SAME

UNIFORM IN SITU CLEANING AND DEPOSITION

HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...

ISOLATOR APPARATUS AND METHODS FOR SUBSTRATE PROCESSING CHAMBERS

CLEANING ASSEMBLIES FOR SUBSTRATE PROCESSING CHAMBERS

HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...

UNIFORM IN SITU CLEANING AND DEPOSITION

METHODS TO ELIMINATE OF DEPOSITION ON WAFER BEVEL AND BACKSIDE

DISTRIBUTION COMPONENTS FOR SEMICONDUCTOR PROCESSING SYSTEMS

MULTIPLE PROCESS SEMICONDUCTOR PROCESSING SYSTEM

BOTTOM PURGE FOR SEMICONDUCTOR PROCESSING SYSTEM

SEMICONDUCTOR PROCESSING CHAMBERS AND METHODS FOR CLEANING THE SAME

ISOLATOR APPARATUS AND METHODS FOR SUBSTRATE PROCESSING CHAMBERS

BAFFLE IMPLEMENTATION FOR IMPROVING BOTTOM PURGE GAS FLOW UNIFORMITY

GAS BOX FOR CVD CHAMBER

FLAT SUSCEPTOR WITH GROOVES FOR MINIMIZING TEMPERATURE PROFILE ACRO...

SUSCEPTOR DESIGN TO REDUCE EDGE THERMAL PEAK