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Nitish Kumar
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Inspection apparatus and inspection method
Patent number
11,692,948
Issue date
Jul 4, 2023
ASML Netherlands B.V.
Nitish Kumar
G01 - MEASURING TESTING
Information
Patent Grant
Position metrology apparatus and associated optical elements
Patent number
11,428,925
Issue date
Aug 30, 2022
ASML Netherlands B.V.
Arjan Johannes Anton Beukman
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for deriving corrections, method and apparatus...
Patent number
11,243,470
Issue date
Feb 8, 2022
ASML Netherlands B.V.
Nitish Kumar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for detecting substrate surface variations
Patent number
11,092,902
Issue date
Aug 17, 2021
ASML Netherlands B.V.
Johannes Franciscus Martinus D'Achard Van Enschut
G01 - MEASURING TESTING
Information
Patent Grant
Radiation source
Patent number
10,690,995
Issue date
Jun 23, 2020
ASML Netherlands B.V.
Nitish Kumar
G02 - OPTICS
Information
Patent Grant
Metrology methods, metrology apparatus and device manufacturing method
Patent number
10,254,644
Issue date
Apr 9, 2019
ASML Netherlands B.V.
Richard Quintanilha
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
Publication number
20230296533
Publication date
Sep 21, 2023
ASML NETHERLANDS B.V.
Nitish KUMAR
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
Publication number
20200348244
Publication date
Nov 5, 2020
ASML NETHERLANDS B.V.
Nitish KUMAR
G01 - MEASURING TESTING
Information
Patent Application
Position Metrology Apparatus and Associated Optical Elements
Publication number
20200209608
Publication date
Jul 2, 2020
ASML NETHERLANDS B.V.
Arjan Johannes Anton Beukman
G02 - OPTICS
Information
Patent Application
Radiation Source
Publication number
20190302570
Publication date
Oct 3, 2019
ASML NETHERLANDS B.V.
Nitish KUMAR
G02 - OPTICS
Information
Patent Application
METHOD AND APPARATUS FOR DERIVING CORRECTIONS, METHOD AND APPARATUS...
Publication number
20190212660
Publication date
Jul 11, 2019
ASML NETHERLANDS B.V.
Nitish KUMAR
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology Methods, Metrology Apparatus and Device Manufacturing Method
Publication number
20170357155
Publication date
Dec 14, 2017
ASML NETHERLANDS B.V.
Richard QUINTANILHA
G01 - MEASURING TESTING