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Noam Knoll
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Zichron Yaakov, IL
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last 30 patents
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Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
Patent number
7,242,477
Issue date
Jul 10, 2007
KLA-Tencor Technologies Corporation
Walter D. Mieher
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Apparatus and methods for detecting overlay errors using scatterometry
Publication number
20040233441
Publication date
Nov 25, 2004
KLA-Tencor Technologies Corporation
Walter D. Mieher
G01 - MEASURING TESTING