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Noboru Fuse
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Yokohama, JP
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last 30 patents
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Patent Grant
Vertical wafer heat treatment apparatus having dual load lock chambers
Patent number
5,217,501
Issue date
Jun 8, 1993
Tokyo Electron Limited
Noboru Fuse
C30 - CRYSTAL GROWTH
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Patent Grant
Apparatus for reaction treatment
Patent number
4,989,540
Issue date
Feb 5, 1991
Tel Sagami Limited
Noboru Fuse
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Vertical type heat-treating apparatus and heat-treating method
Patent number
4,954,684
Issue date
Sep 4, 1990
Tel Sagami Limited
Kazutsugu Aoki
C21 - METALLURGY OF IRON