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Noboru Hosaka
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Yamanashi, JP
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last 30 patents
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Patent Grant
Processing method for wafers
Patent number
5,357,115
Issue date
Oct 18, 1994
Tokyo Electron Limited
Teruo Asakawa
C30 - CRYSTAL GROWTH
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Patent Grant
Processing system
Patent number
5,248,886
Issue date
Sep 28, 1993
Tokyo Electron Limited
Teruo Asakawa
C30 - CRYSTAL GROWTH