Noboru Nakashima

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Koshi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Polishing cleaning mechanism, substrate processing apparatus, and s...
- Patent number 10,328,546
- Issue date Jun 25, 2019
- Tokyo Electron Limited
- Akihiro Kubo
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing cleaning mechanism, substrate processing apparatus, and s...
- Patent number 9,669,510
- Issue date Jun 6, 2017
- Tokyo Electron Limited
- Akihiro Kubo
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING MEMBER, SUBSTRATE PROCESSING APPARATUS AND SUBST...
- Publication number 20240139780
- Publication date May 2, 2024
- TOKYO ELECTRON LIMITED
- Kento KURUSU
- B08 - CLEANING
Information Patent Application
POLISHING CLEANING MECHANISM, SUBSTRATE PROCESSING APPARATUS, AND S...
- Publication number 20170225289
- Publication date Aug 10, 2017
- TOKYO ELECTRON LIMITED
- Akihiro KUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Polishing Cleaning Mechanism, Substrate Processing Apparatus, and S...
- Publication number 20150133032
- Publication date May 14, 2015
- TOKYO ELECTRON LIMITED
- Akihiro KUBO
- H01 - BASIC ELECTRIC ELEMENTS