Noboru TAKEMOTO

Follow

Person

Miyagi, JP

People

Patents Applicationslast 30 patents

Information Patent Application
PARTICLE BACKFLOW PREVENTING PART AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150170891
- Publication date Jun 18, 2015
- TOKYO ELECTRON LIMITED
- Masanori TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS