Nobuaki Matsuoka

Person

Koshi-Machi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Treatment solution supply apparatus and substrate treatment system
- Patent number 10,807,027
- Issue date Oct 20, 2020
- Tokyo Electron Limited
- Katsunori Ichino
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating and developing apparatus and method, and storage medium
- Patent number 9,460,947
- Issue date Oct 4, 2016
- Tokyo Electron Limited
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus and method
- Patent number 9,417,529
- Issue date Aug 16, 2016
- Tokyo Electron Limited
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus and method
- Patent number 8,985,880
- Issue date Mar 24, 2015
- Tokyo Electron Limited
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus and method
- Patent number 8,888,387
- Issue date Nov 18, 2014
- Tokyo Electron Limited
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method of application and development
- Patent number 8,863,373
- Issue date Oct 21, 2014
- Tokyo Electron Limited
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus and method, and storage medium
- Patent number 8,817,225
- Issue date Aug 26, 2014
- Tokyo Electron Limited
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus
- Patent number 8,740,481
- Issue date Jun 3, 2014
- Tokyo Electron Limited
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus and coating and developing method
- Patent number 8,568,043
- Issue date Oct 29, 2013
- Tokyo Electron Limited
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus
- Patent number 8,534,936
- Issue date Sep 17, 2013
- Tokyo Electron Limited
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus, coating and developing method and...
- Patent number 8,506,186
- Issue date Aug 13, 2013
- Tokyo Electron Limited
- Shinichi Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus, coating and developing method and...
- Patent number 8,480,319
- Issue date Jul 9, 2013
- Tokyo Electron Limited
- Shinichi Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus and method, and storage medium
- Patent number 8,419,299
- Issue date Apr 16, 2013
- Tokyo Electron Limited
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating/developing device and method
- Patent number 8,408,158
- Issue date Apr 2, 2013
- Tokyo Electron Limited
- Masami Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating/developing apparatus and coating/developing method
- Patent number 8,342,761
- Issue date Jan 1, 2013
- Tokyo Electron Limited
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus, substrate processing method, and...
- Patent number 8,313,257
- Issue date Nov 20, 2012
- Tokyo Electron Limited
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus
- Patent number 8,302,556
- Issue date Nov 6, 2012
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,268,384
- Issue date Sep 18, 2012
- Tokyo Electron Limited
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus, liquid processing method and storage m...
- Patent number 8,038,769
- Issue date Oct 18, 2011
- Tokyo Electron Limited
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Heating apparatus, coating and development apparatus, and heating m...
- Patent number 8,025,925
- Issue date Sep 27, 2011
- Tokyo Electron Limited
- Tetsuo Fukuoka
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Coating and developing system with a direct carrying device in a pr...
- Patent number 7,997,813
- Issue date Aug 16, 2011
- Tokyo Electron Limited
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus, substrate processing method, and...
- Patent number 7,955,011
- Issue date Jun 7, 2011
- Tokyo Electron Limited
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solid-state image capturing apparatus and electric information device
- Patent number 7,952,627
- Issue date May 31, 2011
- Sharp Kabushiki Kaisha
- Hidenori Morimoto
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Liquid processing apparatus, liquid processing method and storage m...
- Patent number 7,914,613
- Issue date Mar 29, 2011
- Tokyo Electron Limited
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing system, coating and developing method and st...
- Patent number 7,871,211
- Issue date Jan 18, 2011
- Tokyo Electron Limited
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method of application and development
- Patent number 7,841,072
- Issue date Nov 30, 2010
- Tokyo Electron Limited
- Nobuaki Matsuoka
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Developing apparatus, developing method, coating and developing sys...
- Patent number 7,828,488
- Issue date Nov 9, 2010
- Tokyo Electron Limited
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,819,080
- Issue date Oct 26, 2010
- Tokyo Electron Limited
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus
- Patent number 7,793,609
- Issue date Sep 14, 2010
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing system, coating and developing method and st...
- Patent number 7,789,577
- Issue date Sep 7, 2010
- Tokyo Electron Limited
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TREATMENT SOLUTION SUPPLY APPARATUS AND SUBSTRATE TREATMENT SYSTEM
- Publication number 20190076763
- Publication date Mar 14, 2019
- TOKYO ELECTRON LIMITED
- Katsunori ICHINO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COATING AND DEVELOPING APPARATUS AND METHOD
- Publication number 20150219994
- Publication date Aug 6, 2015
- TOKYO ELECTRON LIMITED
- Nobuaki MATSUOKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS AND METHOD, AND STORAGE MEDIUM
- Publication number 20140327890
- Publication date Nov 6, 2014
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS
- Publication number 20130329199
- Publication date Dec 12, 2013
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD AND...
- Publication number 20120063765
- Publication date Mar 15, 2012
- TOKYO ELECTRON LIMITED
- Shinichi HAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS AND METHOD, AND STORAGE MEDIUM
- Publication number 20120057861
- Publication date Mar 8, 2012
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD AND...
- Publication number 20120057862
- Publication date Mar 8, 2012
- TOKYO ELECTRON LIMITED
- Shinichi HAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS AND METHOD, AND STORAGE MEDIUM
- Publication number 20120015307
- Publication date Jan 19, 2012
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS AND METHOD
- Publication number 20120013859
- Publication date Jan 19, 2012
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS
- Publication number 20120008936
- Publication date Jan 12, 2012
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS AND METHOD
- Publication number 20120009528
- Publication date Jan 12, 2012
- TOKYO ELECTRON LIMITED
- Nobuaki MATSUOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS, SUBSTRATE PROCESSING METHOD, AND...
- Publication number 20110211825
- Publication date Sep 1, 2011
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...
- Publication number 20110143645
- Publication date Jun 16, 2011
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS AND COATING AND DEVELOPING METHOD
- Publication number 20110086316
- Publication date Apr 14, 2011
- TOKYO ELECTRON LIMITED
- Nobuaki MATSUOKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING/DEVELOPING APPARATUS AND COATING/DEVELOPING METHOD
- Publication number 20110043773
- Publication date Feb 24, 2011
- TOKYO ELECTRON LIMITED
- Nobuaki MATSUOKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD OF APPLICATION AND DEVELOPMENT
- Publication number 20110032494
- Publication date Feb 10, 2011
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20110014562
- Publication date Jan 20, 2011
- TOKYO ELECTRON LIMITED
- Nobuaki MATSUOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS
- Publication number 20100326353
- Publication date Dec 30, 2010
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS
- Publication number 20100300353
- Publication date Dec 2, 2010
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD
- Publication number 20090214759
- Publication date Aug 27, 2009
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Solid-state image capturing apparatus and electric information device
- Publication number 20080303929
- Publication date Dec 11, 2008
- Sharp Kabushiki Kaisha
- Hidenori Morimoto
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
COATING AND DEVELOPING SYSTEM, COATING AND DEVELOPING METHOD AND ST...
- Publication number 20080268383
- Publication date Oct 30, 2008
- TOKYO ELECTRON LIMITED
- Nobuaki MATSUOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING APPARATUS, DEVELOPING METHOD, COATING AND DEVELOPING SYS...
- Publication number 20080267619
- Publication date Oct 30, 2008
- TOKYO ELECTRON LIMITED
- Nobuaki MATSUOKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATER/DEVELOPER, COATING/DEVELOPING METHOD, AND STORAGE MEDIUM
- Publication number 20080266532
- Publication date Oct 30, 2008
- TOKYO ELECTRON LIMITED
- Nobuaki MATSUOKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING SYSTEM, COATING AND DEVELOPING METHOD AND ST...
- Publication number 20080241403
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Nobuaki MATSUOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING SYSTEM, COATING AND DEVELOPING METHOD AND ST...
- Publication number 20080241402
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Nobuaki MATSUOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing apparatus, liquid processing method and storage m...
- Publication number 20080060516
- Publication date Mar 13, 2008
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS, SUBSTRATE PROCESSING METHOD, AND...
- Publication number 20080014333
- Publication date Jan 17, 2008
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing method and liquid processing apparatus
- Publication number 20070245953
- Publication date Oct 25, 2007
- Tsunenaga Nakashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATING APPARATUS, HEAT TREATING METHOD, AND STORAGE MEDIUM
- Publication number 20070218706
- Publication date Sep 20, 2007
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS

Nobuaki Matsuoka

Person

Patents Grantslast 30 patents

Treatment solution supply apparatus and substrate treatment system

Coating and developing apparatus and method, and storage medium

Coating and developing apparatus and method

Coating and developing apparatus and method

Coating and developing apparatus and method

Apparatus and method of application and development

Coating and developing apparatus and method, and storage medium

Coating and developing apparatus

Coating and developing apparatus and coating and developing method

Coating and developing apparatus

Coating and developing apparatus, coating and developing method and...

Coating and developing apparatus, coating and developing method and...

Coating and developing apparatus and method, and storage medium

Coating/developing device and method

Coating/developing apparatus and coating/developing method

Coating and developing apparatus, substrate processing method, and...

Coating and developing apparatus

Substrate processing apparatus and substrate processing method

Liquid processing apparatus, liquid processing method and storage m...

Heating apparatus, coating and development apparatus, and heating m...

Coating and developing system with a direct carrying device in a pr...

Coating and developing apparatus, substrate processing method, and...

Solid-state image capturing apparatus and electric information device

Liquid processing apparatus, liquid processing method and storage m...

Coating and developing system, coating and developing method and st...

Apparatus and method of application and development

Developing apparatus, developing method, coating and developing sys...

Substrate processing apparatus and substrate processing method

Coating and developing apparatus

Coating and developing system, coating and developing method and st...

Patents Applicationslast 30 patents

TREATMENT SOLUTION SUPPLY APPARATUS AND SUBSTRATE TREATMENT SYSTEM

COATING AND DEVELOPING APPARATUS AND METHOD

COATING AND DEVELOPING APPARATUS AND METHOD, AND STORAGE MEDIUM

COATING AND DEVELOPING APPARATUS

COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD AND...

COATING AND DEVELOPING APPARATUS AND METHOD, AND STORAGE MEDIUM

COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD AND...

COATING AND DEVELOPING APPARATUS AND METHOD, AND STORAGE MEDIUM

COATING AND DEVELOPING APPARATUS AND METHOD

COATING AND DEVELOPING APPARATUS

COATING AND DEVELOPING APPARATUS AND METHOD

COATING AND DEVELOPING APPARATUS, SUBSTRATE PROCESSING METHOD, AND...

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...

COATING AND DEVELOPING APPARATUS AND COATING AND DEVELOPING METHOD

COATING/DEVELOPING APPARATUS AND COATING/DEVELOPING METHOD

APPARATUS AND METHOD OF APPLICATION AND DEVELOPMENT

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

COATING AND DEVELOPING APPARATUS

COATING AND DEVELOPING APPARATUS

SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD

Solid-state image capturing apparatus and electric information device

COATING AND DEVELOPING SYSTEM, COATING AND DEVELOPING METHOD AND ST...

DEVELOPING APPARATUS, DEVELOPING METHOD, COATING AND DEVELOPING SYS...

COATER/DEVELOPER, COATING/DEVELOPING METHOD, AND STORAGE MEDIUM

COATING AND DEVELOPING SYSTEM, COATING AND DEVELOPING METHOD AND ST...

COATING AND DEVELOPING SYSTEM, COATING AND DEVELOPING METHOD AND ST...

Liquid processing apparatus, liquid processing method and storage m...

COATING AND DEVELOPING APPARATUS, SUBSTRATE PROCESSING METHOD, AND...

Liquid processing method and liquid processing apparatus

HEAT TREATING APPARATUS, HEAT TREATING METHOD, AND STORAGE MEDIUM