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Miyagi, JP
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last 30 patents
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Patent Grant
Etching method
Patent number
11,404,283
Issue date
Aug 2, 2022
Tokyo Electron Limited
Shigeru Tahara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Etching method
Patent number
10,770,308
Issue date
Sep 8, 2020
Tokyo Electron Limited
Shigeru Tahara
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ETCHING METHOD
Publication number
20200402814
Publication date
Dec 24, 2020
TOKYO ELECTRON LIMITED
Shigeru TAHARA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
ETCHING METHOD
Publication number
20190295856
Publication date
Sep 26, 2019
TOKYO ELECTRON LIMITED
Shigeru TAHARA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
MAGNETRON SPUTTERING METHOD, AND MAGNETRON SPUTTERING APPARATUS
Publication number
20110186425
Publication date
Aug 4, 2011
TOKYO ELECTRON LIMITED
Tadahiro Ohmi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
High-reflectance visible-light reflector member, liquid-crystal dis...
Publication number
20070030568
Publication date
Feb 8, 2007
TOHOKU UNIVERSITY FUTURE VISION INC.
Tadahiro Ohmi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...