TREA

Nobuaki Shigematsu

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  • Yamanashi-Ken, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Silicon nitride film formation method
    • Patent number 6,355,582
    • Issue date Mar 12, 2002
    • Tokyo Electron Limited
    • Keizo Hosoda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method for forming doped polysilicon films
    • Patent number 5,783,257
    • Issue date Jul 21, 1998
    • Tokyo Electron Limited
    • Seiichi Shishiguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...