Nobuaki SHINDO

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of cleaning plasma processing apparatus and plasma processin...
- Patent number 11,887,824
- Issue date Jan 30, 2024
- Tokyo Electron Limited
- Yasutaka Hama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,557,498
- Issue date Jan 17, 2023
- Tokyo Electron Limited
- Toru Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,538,707
- Issue date Dec 27, 2022
- Tokyo Electron Limited
- Toru Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 9,425,028
- Issue date Aug 23, 2016
- Tokyo Electron Limited
- Yusei Kuwabara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF CLEANING PLASMA PROCESSING APPARATUS AND PLASMA PROCESSIN...
- Publication number 20240063000
- Publication date Feb 22, 2024
- TOKYO ELECTRON LIMITED
- Yasutaka HAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING PLASMA PROCESSING APPARATUS AND PLASMA PROCESSIN...
- Publication number 20220037133
- Publication date Feb 3, 2022
- TOKYO ELECTRON LIMITED
- Yasutaka HAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20210233793
- Publication date Jul 29, 2021
- TOKYO ELECTRON LIMITED
- Yasutaka HAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210175049
- Publication date Jun 10, 2021
- TOKYO ELECTRON LIMITED
- Yasutaka HAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200312695
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Toru TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20140116620
- Publication date May 1, 2014
- TOKYO ELECTRON LIMITED
- Yusei KUWABARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...