Nobuaki TANABE

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Patents Grantslast 30 patents

Information Patent Grant
Cooling system, substrate processing system and flow rate adjusting...
- Patent number 10,415,899
- Issue date Sep 17, 2019
- ASM IP Holding B.V.
- Nobuaki Tanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING ELECTROSTATIC CHUCK
- Publication number 20240352587
- Publication date Oct 24, 2024
- ASM IP HOLDING B.V.
- Nobuaki Tanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF MAKING HEATING BLOCKS, HEATING BLOCKS, AND SEMICONDUCTOR...
- Publication number 20230389134
- Publication date Nov 30, 2023
- ASM IP HOLDING B.V.
- ChangMin Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OPERATING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200370175
- Publication date Nov 26, 2020
- ASM IP HOLDING B.V.
- Nobuaki TANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLING SYSTEM, SUBSTRATE PROCESSING SYSTEM AND FLOW RATE ADJUSTING...
- Publication number 20190204029
- Publication date Jul 4, 2019
- ASM IP HOLDING B.V.
- Nobuaki TANABE
- F28 - HEAT EXCHANGE IN GENERAL