Nobuhara Noji

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Mapping-projection-type electron beam apparatus for inspecting samp...
- Patent number 8,124,933
- Issue date Feb 28, 2012
- Ebara Corporation
- Kenji Watanabe
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Electron beam apparatus and method of manufacturing semiconductor d...
- Publication number 20070018101
- Publication date Jan 25, 2007
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING