Nobuhiko Mouri

Person

Koshi-City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,230,515
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Nobuhiko Mouri
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,887,869
- Issue date Jan 30, 2024
- Tokyo Electron Limited
- Nobuhiko Mouri
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,482,428
- Issue date Oct 25, 2022
- Tokyo Electron Limited
- Nobuhiko Mouri
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,139,182
- Issue date Oct 5, 2021
- Tokyo Electron Limited
- Nobuhiko Mouri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus
- Patent number 10,665,478
- Issue date May 26, 2020
- Tokyo Electron Limited
- Nobuhiko Mouri
- B08 - CLEANING
Information Patent Grant
Apparatus for polishing rear surface of substrate, system for polis...
- Patent number 9,095,953
- Issue date Aug 4, 2015
- Tokyo Electron Limited
- Mitsunori Nakamori
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and storag...
- Patent number 8,356,376
- Issue date Jan 22, 2013
- Tokyo Electron Limited
- Nobuhiko Mouri
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240213046
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Nobuhiko Mouri
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SU...
- Publication number 20240162052
- Publication date May 16, 2024
- TOKYO ELECTRON LIMITED
- Takanori OBARU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210398827
- Publication date Dec 23, 2021
- TOKYO ELECTRON LIMITED
- Nobuhiko Mouri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200083064
- Publication date Mar 12, 2020
- TOKYO ELECTRON LIMITED
- Nobuhiko Mouri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190181022
- Publication date Jun 13, 2019
- TOKYO ELECTRON LIMITED
- Nobuhiko Mouri
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20170278727
- Publication date Sep 28, 2017
- TOKYO ELECTRON LIMITED
- Nobuhiko Mouri
- B08 - CLEANING
Information Patent Application
Apparatus for Polishing Rear Surface of Substrate, System for Polis...
- Publication number 20110312247
- Publication date Dec 22, 2011
- TOKYO ELECTRON LIMITED
- Mitsunori Nakamori
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20100307539
- Publication date Dec 9, 2010
- TOKYO ELECTRON LIMITED
- Nobuhiko MOURI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20100108095
- Publication date May 6, 2010
- TOKYO ELECTRON LIMITED
- Nobuhiko MOURI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS
- Publication number 20090313776
- Publication date Dec 24, 2009
- TOKYO ELECTRON LIMITED
- Nobuhiko MOURI
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND STORAG...
- Publication number 20090314311
- Publication date Dec 24, 2009
- TOKYO ELECTRON LIMITED
- Nobuhiko MOURI
- B08 - CLEANING

Nobuhiko Mouri

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Liquid processing apparatus

Apparatus for polishing rear surface of substrate, system for polis...

Substrate cleaning apparatus, substrate cleaning method, and storag...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SU...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

LIQUID PROCESSING APPARATUS

Apparatus for Polishing Rear Surface of Substrate, System for Polis...

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE CLEANING METHOD

SUBSTRATE CLEANING APPARATUS

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND STORAG...