Nobuhiko Yamamoto

Person

Hyogo-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 12,046,453
- Issue date Jul 23, 2024
- Tokyo Electron Limited
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma source and plasma processing apparatus
- Patent number 10,319,567
- Issue date Jun 11, 2019
- Tokyo Electron Limited
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Acquisition method for S-parameters in microwave introduction modul...
- Patent number 9,702,913
- Issue date Jul 11, 2017
- Tokyo Electron Limited
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,267,040
- Issue date Sep 18, 2012
- Tokyo Electron Limited
- Kiyotaka Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma oxidizing method, plasma processing apparatus, and storage m...
- Patent number 7,910,495
- Issue date Mar 22, 2011
- Tokyo Electron Limited
- Toshihiko Shiozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 7,226,524
- Issue date Jun 5, 2007
- Tokyo Electron Limited
- Shigeru Kasai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20210082727
- Publication date Mar 18, 2021
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING APPARATUS, HEATING METHOD, AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200411340
- Publication date Dec 31, 2020
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MICROWAVE PLASMA SOURCE AND PLASMA PROCESSING APPARATUS
- Publication number 20160284516
- Publication date Sep 29, 2016
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACQUISITION METHOD FOR S-PARAMETERS IN MICROWAVE INTRODUCTION MODUL...
- Publication number 20150212127
- Publication date Jul 30, 2015
- TOKYO ELECTRON LIMITED
- Taro Ikeda
- G01 - MEASURING TESTING
Information Patent Application
MICROWAVE HEATING APPARATUS
- Publication number 20140291318
- Publication date Oct 2, 2014
- TOKYO ELECTRON LIMITED
- Kouji SHIMOMURA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MICROWAVE HEATING APPARATUS AND PROCESSING METHOD
- Publication number 20140117009
- Publication date May 1, 2014
- TOKYO ELECTRON LIMITED
- Nobuhiko YAMAMOTO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MICROWAVE IRRADIATION APPARATUS
- Publication number 20140034636
- Publication date Feb 6, 2014
- TOKYO ELECTRON LIMITED
- Nobuhiko YAMAMOTO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA OXIDIZING METHOD, PLASMA PROCESSING APPARATUS, AND STORAGE M...
- Publication number 20100015815
- Publication date Jan 21, 2010
- Tokyo Electron Limited
- Toshihiko Shiozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Microwave Plasma Processing Apparatus
- Publication number 20080190560
- Publication date Aug 14, 2008
- Caizhong Tian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Apparatus and Plasma Processing Method
- Publication number 20070264441
- Publication date Nov 15, 2007
- TOKYO ELECTRON LIMITED
- Kiyotaka Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processor
- Publication number 20050034815
- Publication date Feb 17, 2005
- Shigeru Kasai
- H01 - BASIC ELECTRIC ELEMENTS

Nobuhiko Yamamoto

Person

Patents Grantslast 30 patents

Plasma processing apparatus

Microwave plasma source and plasma processing apparatus

Acquisition method for S-parameters in microwave introduction modul...

Plasma processing apparatus and plasma processing method

Plasma oxidizing method, plasma processing apparatus, and storage m...

Plasma processing apparatus

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

HEATING APPARATUS, HEATING METHOD, AND SUBSTRATE PROCESSING APPARATUS

MICROWAVE PLASMA SOURCE AND PLASMA PROCESSING APPARATUS

ACQUISITION METHOD FOR S-PARAMETERS IN MICROWAVE INTRODUCTION MODUL...

MICROWAVE HEATING APPARATUS

MICROWAVE HEATING APPARATUS AND PROCESSING METHOD

MICROWAVE IRRADIATION APPARATUS

PLASMA OXIDIZING METHOD, PLASMA PROCESSING APPARATUS, AND STORAGE M...

Microwave Plasma Processing Apparatus

Plasma Processing Apparatus and Plasma Processing Method

Plasma processor