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Nobuhiro Harada
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Chiba, JP
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last 30 patents
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Patent Application
Sputtering Target and Method of Processing a Sputtering Target
Publication number
20120055787
Publication date
Mar 8, 2012
Ulvac, Inc.
Akira Ohba
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...