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Nobuhiro Kodachi
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Tochigi-ken, JP
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Patents Grants
last 30 patents
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Patent Grant
Alignment system and projection exposure apparatus
Patent number
6,847,432
Issue date
Jan 25, 2005
Canon Kabushiki Kaisha
Yuichi Osakabe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment system and projection exposure apparatus
Patent number
6,683,673
Issue date
Jan 27, 2004
Canon Kabushiki Kaisha
Yuichi Osakabe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment system and projection exposure apparatus
Patent number
6,532,056
Issue date
Mar 11, 2003
Canon Kabushiki Kaisha
Yuichi Osakabe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for inspecting a surface state
Patent number
5,963,316
Issue date
Oct 5, 1999
Canon Kabushiki Kaisha
Seiya Miura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inspecting apparatus having a detection sensitivity controller means
Patent number
5,105,092
Issue date
Apr 14, 1992
Canon Kabushiki Kaisha
Katsutoshi Natsubori
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Alignment system and projection exposure apparatus
Publication number
20040070741
Publication date
Apr 15, 2004
Canon Kabushiki Kaisha
Yuichi Osakabe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment system and projection exposure apparatus
Publication number
20030090642
Publication date
May 15, 2003
Canon Kabushiki Kaisha
Yuichi Osakabe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ALIGNMENT SYSTEM AND PROJECTION EXPOSURE APPARATUS
Publication number
20020003615
Publication date
Jan 10, 2002
YUICHI OSAKABE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY