Membership
Tour
Register
Log in
Nobuhiro Komine
Follow
Person
Nagoya, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Mask manufacturing method and mask set
Patent number
11,143,950
Issue date
Oct 12, 2021
TOSHIBA MEMORY CORPORATION
Yuki Akamatsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Exposure method, exposure system, and manufacturing method for semi...
Patent number
10,599,045
Issue date
Mar 24, 2020
TOSHIBA MEMORY CORPORATION
Yoshio Mizuta
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imprint apparatus and manufacturing method of semiconductor device
Patent number
10,488,754
Issue date
Nov 26, 2019
TOSHIBA MEMORY CORPORATION
Nobuhiro Komine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate measurement system, method of measuring substrate, and co...
Patent number
10,295,409
Issue date
May 21, 2019
TOSHIBA MEMORY CORPORATION
Miki Toshima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imprint device and pattern forming method
Patent number
9,952,505
Issue date
Apr 24, 2018
TOSHIBA MEMORY CORPORATION
Yosuke Okamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern shape adjustment method, pattern shape adjustment system, e...
Patent number
9,885,960
Issue date
Feb 6, 2018
TOSHIBA MEMORY CORPORATION
Nobuhiro Komine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positional deviation measuring device, non-transitory computer-read...
Patent number
9,784,573
Issue date
Oct 10, 2017
TOSHIBA MEMORY CORPORATION
Hidenori Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask alignment mark, photomask, exposure apparatus, exposure method...
Patent number
9,772,566
Issue date
Sep 26, 2017
TOSHIBA MEMORY CORPORATION
Nobuhiro Komine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Wafer lithography equipment
Patent number
9,760,017
Issue date
Sep 12, 2017
TOSHIBA MEMORY CORPORATION
Kazufumi Shiozawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming mark pattern, recording medium and method of gene...
Patent number
9,741,564
Issue date
Aug 22, 2017
TOSHIBA MEMORY CORPORATION
Yuji Setta
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask set, fabrication method of mask set, manufacturing method of s...
Patent number
9,703,912
Issue date
Jul 11, 2017
Kabushiki Kaisha Toshiba
Ai Furubayashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask processing apparatus and mask processing method
Patent number
9,632,407
Issue date
Apr 25, 2017
Kabushiki Kaisha Yoshiba
Hidenori Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Deflection measuring device and deflection measuring method
Patent number
9,459,093
Issue date
Oct 4, 2016
Kabushiki Kaisha Toshiba
Hidenori Sato
G01 - MEASURING TESTING
Information
Patent Grant
Adjusting method of pattern transferring plate, laser application m...
Patent number
9,429,849
Issue date
Aug 30, 2016
Kabushiki Kaisha Toshiba
Hidenori Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reticle mark arrangement method and nontransitory computer readable...
Patent number
9,396,299
Issue date
Jul 19, 2016
Kabushiki Kaisha Toshiba
Shinichi Nakagawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Light exposure condition analysis method, nontransitory computer re...
Patent number
9,368,413
Issue date
Jun 14, 2016
Kabushiki Kaisha Toshiba
Nobuhiro Komine
G01 - MEASURING TESTING
Information
Patent Grant
Overlay displacement amount measuring method, positional displaceme...
Patent number
9,354,527
Issue date
May 31, 2016
Kabushiki Kaisha Toshiba
Hidenori Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern formation method and pattern formation apparatus
Patent number
9,260,300
Issue date
Feb 16, 2016
Kabushiki Kaisha Toshiba
Kentaro Matsunaga
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Exposure apparatus and transfer characteristics measuring method
Patent number
9,239,526
Issue date
Jan 19, 2016
Kabushiki Kaisha Toshiba
Hidenori Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of focus measurement, exposure apparatus, and method of manu...
Patent number
9,128,388
Issue date
Sep 8, 2015
Kabushiki Kaisha Toshiba
Nobuhiro Komine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for controlling exposure apparatus and exposure apparatus
Patent number
9,104,115
Issue date
Aug 11, 2015
Kabushiki Kaisha Toshiba
Nobuhiro Komine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measurement mark, method for measurement, and measurement apparatus
Patent number
8,976,356
Issue date
Mar 10, 2015
Kabushiki Kaisha Toshiba
Nobuhiro Komine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reflective mask
Patent number
8,928,871
Issue date
Jan 6, 2015
Kabushiki Kaisha Toshiba
Masaru Suzuki
G02 - OPTICS
Information
Patent Grant
Imprint apparatus, imprint method, and manufacturing method of semi...
Patent number
8,907,346
Issue date
Dec 9, 2014
Kabushiki Kaisha Toshiba
Takeshi Koshiba
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus inspection mask and exposure apparatus inspectio...
Patent number
8,343,692
Issue date
Jan 1, 2013
Kabushiki Kaisha Toshiba
Nobuhiro Komine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photomask, photomask superimposition correcting method, and manufac...
Patent number
7,906,258
Issue date
Mar 15, 2011
Kabushiki Kaisha Toshiba
Nobuhiro Komine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure processing system, exposure processing method and method f...
Patent number
7,630,052
Issue date
Dec 8, 2009
Kabushiki Kaisha Toshiba
Takuya Kono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for correcting a plurality of exposure tools, method for...
Patent number
7,164,960
Issue date
Jan 16, 2007
Kabushiki Kaisha Toshiba
Nobuhiro Komine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reticle, exposure monitoring method, exposure method and manufactur...
Patent number
7,092,068
Issue date
Aug 15, 2006
Kabushiki Kaisha Toshiba
Nobuhiro Komine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method and method of manufacturing semiconductor device
Patent number
6,872,508
Issue date
Mar 29, 2005
Kabushiki Kaisha Toshiba
Nobuhiro Komine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURI...
Publication number
20220293418
Publication date
Sep 15, 2022
KIOXIA Corporation
Takuya MIZUTANI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK MANUFACTURING METHOD AND MASK SET
Publication number
20190079386
Publication date
Mar 14, 2019
Toshiba Memory Corporation
Yuki AKAMATSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXPOSURE METHOD, EXPOSURE SYSTEM, AND MANUFACTURING METHOD FOR SEMI...
Publication number
20190079412
Publication date
Mar 14, 2019
Toshiba Memory Corporation
Yoshio MIZUTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPRINT APPARATUS AND MANUFACTURING METHOD OF SEMICONDUCTOR
Publication number
20180217493
Publication date
Aug 2, 2018
Toshiba Memory Corporation
Nobuhiro KOMINE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HOLDING APPARATUS
Publication number
20180082880
Publication date
Mar 22, 2018
Toshiba Memory Corporation
Nobuhiro KOMINE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE MEASUREMENT SYSTEM, METHOD OF MEASURING SUBSTRATE, AND CO...
Publication number
20170235232
Publication date
Aug 17, 2017
KABUSHIKI KAISHA TOSHIBA
Miki TOSHIMA
G01 - MEASURING TESTING
Information
Patent Application
MASK ALIGNMENT MARK, PHOTOMASK, EXPOSURE APPARATUS, EXPOSURE METHOD...
Publication number
20170003606
Publication date
Jan 5, 2017
KABUSHIKI KAISHA TOSHIBA
Nobuhiro Komine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MEASUREMENT APPARATUS, MEASUREMENT METHOD, AND MANUFACTURING METHOD...
Publication number
20160379902
Publication date
Dec 29, 2016
KABUSHIKI KAISHA TOSHIBA
Yoshinori HAGIO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING MARK PATTERN, RECORDING MEDIUM AND METHOD OF GENE...
Publication number
20160322307
Publication date
Nov 3, 2016
KABUSHIKI KAISHA TOSHIBA
Yuji SETTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER LITHOGRAPHY EQUIPMENT
Publication number
20160274470
Publication date
Sep 22, 2016
KABUSHIKI KAISHA TOSHIBA
Kazufumi SHIOZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND MANUFACTURING METHOD OF DE...
Publication number
20160266500
Publication date
Sep 15, 2016
KABUSHIKI KAISHA TOSHIBA
Nobuhiro KOMINE
G01 - MEASURING TESTING
Information
Patent Application
MASK SET, FABRICATION METHOD OF MASK SET, MANUFACTURING METHOD OF S...
Publication number
20160266484
Publication date
Sep 15, 2016
KABUSHIKI KAISHA TOSHIBA
Ai Furubayashi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
POSITIONAL DEVIATION MEASURING DEVICE, NON-TRANSITORY COMPUTER-READ...
Publication number
20160245645
Publication date
Aug 25, 2016
KABUSHIKI KAISHA TOSHIBA
Hidenori SATO
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE HOLDING DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20160225650
Publication date
Aug 4, 2016
KABUSHIKI KAISHA TOSHIBA
Nobuhiro KOMINE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MARK, SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR WAFER
Publication number
20160043037
Publication date
Feb 11, 2016
KABUSHIKI KAISHA TOSHIBA
Shinichi NAKAGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASK PROCESSING APPARATUS, MASK PROCESSING METHOD AND RECORDING MEDIUM
Publication number
20160018730
Publication date
Jan 21, 2016
KABUSHIKI KAISHA TOSHIBA
Hidenori Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERN FORMING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DE...
Publication number
20160020099
Publication date
Jan 21, 2016
KABUSHIKI KAISHA TOSHIBA
Kazuhiro SEGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIGHT EXPOSURE CONDITION ANALYSIS METHOD, NONTRANSITORY COMPUTER RE...
Publication number
20160005661
Publication date
Jan 7, 2016
KABUSHIKI KAISHA TOSHIBA
Nobuhiro KOMINE
G01 - MEASURING TESTING
Information
Patent Application
RETICLE MARK ARRANGEMENT METHOD AND NONTRANSITORY COMPUTER READABLE...
Publication number
20150339423
Publication date
Nov 26, 2015
KABUSHIKI KAISHA TOSHIBA
Shinichi Nakagawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
IMPRINT DEVICE AND PATTERN FORMING METHOD
Publication number
20150251350
Publication date
Sep 10, 2015
KABUSHIKI KAISHA TOSHIBA
Yosuke OKAMOTO
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
ADJUSTING METHOD OF PATTERN TRANSFERRING PLATE, LASER APPLICATION M...
Publication number
20150253676
Publication date
Sep 10, 2015
KABUSHIKI KAISHA TOSHIBA
Hidenori SATO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEFLECTION MEASURING DEVICE AND DEFLECTION MEASURING METHOD
Publication number
20150233706
Publication date
Aug 20, 2015
KABUSHIKI KAISHA TOSHIBA
Hidenori SATO
G01 - MEASURING TESTING
Information
Patent Application
PATTERN SHAPE ADJUSTMENT METHOD, PATTERN SHAPE ADJUSTMENT SYSTEM, E...
Publication number
20150183059
Publication date
Jul 2, 2015
KABUSHIKI KAISHA TOSHIBA
Nobuhiro Komine
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
OVERLAY DISPLACEMENT AMOUNT MEASURING METHOD, POSITIONAL DISPLACEME...
Publication number
20150036717
Publication date
Feb 5, 2015
KABUSHIKI KAISHA TOSHIBA
Hidenori SATO
G01 - MEASURING TESTING
Information
Patent Application
EXPOSURE APPARATUS AND TRANSFER CHARACTERISTICS MEASURING METHOD
Publication number
20150022791
Publication date
Jan 22, 2015
KABUSHIKI KAISHA TOSHIBA
Hidenori Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK DISTORTION MEASURING APPARATUS AND METHOD OF MEASURING MASK DI...
Publication number
20150009488
Publication date
Jan 8, 2015
KABUSHIKI KAISHA TOSHIBA
Yosuke OKAMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF FOCUS MEASUREMENT, EXPOSURE APPARATUS, AND METHOD OF MANU...
Publication number
20140370719
Publication date
Dec 18, 2014
KABUSHIKI KAISHA TOSHIBA
Nobuhiro KOMINE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXPOSURE SYSTEM AND EXPOSURE METHOD
Publication number
20140285787
Publication date
Sep 25, 2014
KABUSHIKI KAISHA TOSHIBA
Eiji YONEDA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ELECTROSTATIC CHUCK, RETICLE, AND ELECTROSTATIC CHUCK METHOD
Publication number
20140240892
Publication date
Aug 28, 2014
KABUSHIKI KAISHA TOSHIBA
Yosuke OKAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEASUREMENT MARK, METHOD FOR MEASUREMENT, AND MEASUREMENT APPARATUS
Publication number
20140240704
Publication date
Aug 28, 2014
Nobuhiro KOMINE
H01 - BASIC ELECTRIC ELEMENTS