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Nobuhiro Mukuta
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Kyoto, JP
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last 30 patents
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Patent Grant
Scheduling method and program for a substrate processing apparatus
Patent number
6,889,105
Issue date
May 3, 2005
Dainippon Screen Mfg. Co., Ltd.
Nobuhiro Mukuta
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Scheduling method and program for a substrate processing apparatus
Patent number
6,807,452
Issue date
Oct 19, 2004
Dainippon Screen Mfg. Co., Ltd.
Nobuhiro Mukuta
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND POWER SOURCE MANAGEMENT METHOD
Publication number
20130178971
Publication date
Jul 11, 2013
Koji Hashimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Scheduling method and program for a substrate processing apparatus
Publication number
20030055522
Publication date
Mar 20, 2003
Dainippon Screen Mfg, Co., Ltd.
Nobuhiro Mukuta
G05 - CONTROLLING REGULATING
Information
Patent Application
Scheduling method and program for a substrate processing apparatus
Publication number
20020173868
Publication date
Nov 21, 2002
Dainippon Screen Mfg. Co., Ltd.
Nobuhiro Mukuta
G05 - CONTROLLING REGULATING