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Nobuhiro Sakamoto
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Tokyo, JP
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last 30 patents
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Patent Grant
Precise critical dimension control using bilayer ALD
Patent number
9,443,716
Issue date
Sep 13, 2016
Applied Materials, Inc.
Kenji Takeshita
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Plasma Module With Slotted Ground Plate
Publication number
20170076917
Publication date
Mar 16, 2017
Applied Materials, Inc.
Joseph Yudovsky
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
Precise Critical Dimension Control Using Bilayer ALD
Publication number
20160104613
Publication date
Apr 14, 2016
Applied Materials, Inc.
Kenji Takeshita
H01 - BASIC ELECTRIC ELEMENTS